EP 3887568 A2 20211006 - METHOD FOR PRODUCING A COMPONENT PART OF A CVD REACTOR
Title (en)
METHOD FOR PRODUCING A COMPONENT PART OF A CVD REACTOR
Title (de)
VERFAHREN ZUR HERSTELLUNG EINES BESTANDTEILS EINES CVD-REAKTORS
Title (fr)
PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT CONSTITUTIF D'UN RÉACTEUR CVD
Publication
Application
Priority
- DE 102018130140 A 20181128
- EP 2019082674 W 20191127
Abstract (en)
[origin: WO2020109357A2] The invention relates to the use of a component made of a quartz blank, as a component part of a CVD reactor (1), in which component at least one cavity (8', 8", 8''; 13, 14, 14'; 9.1, 9.2, 9.3, 9.4, 9.5; 35, 36, 37, 38, 39, 40, 41) has been created by selective laser etching, wherein a fluid flows through the at least one cavity (8', 8'', 8''; 13, 14, 14'; 9.1, 9.2, 9.3, 9.4, 9.5; 35, 36, 37, 38, 39, 40, 41), and the component, when in use, is heated to temperatures in excess of 500°C and comes into contact with hydrides of the main groups IV, V or VI and/ or with organometallic compounds or halogenides of elements of the main groups II, III or V.
IPC 8 full level
C23C 16/455 (2006.01); B23K 26/00 (2014.01); B23K 26/352 (2014.01); B23K 26/359 (2014.01); B23K 26/362 (2014.01); B23K 26/382 (2014.01); B23K 26/402 (2014.01)
CPC (source: EP KR US)
B23K 26/362 (2013.01 - EP KR); B23K 26/364 (2015.10 - US); B23K 26/382 (2015.10 - EP KR); B23K 26/389 (2015.10 - US); B23K 26/402 (2013.01 - EP KR US); C23C 16/4408 (2013.01 - EP); C23C 16/45508 (2013.01 - EP KR US); C23C 16/4558 (2013.01 - EP KR); B23K 2103/50 (2018.08 - EP KR); B23K 2103/52 (2018.08 - US); B23K 2103/54 (2018.08 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102018130140 A1 20200528; CN 113302333 A 20210824; EP 3887568 A2 20211006; JP 2022513144 A 20220207; JP 7460621 B2 20240402; KR 20210094043 A 20210728; TW 202035778 A 20201001; US 2022033965 A1 20220203; WO 2020109357 A2 20200604; WO 2020109357 A3 20200806
DOCDB simple family (application)
DE 102018130140 A 20181128; CN 201980089016 A 20191127; EP 19816553 A 20191127; EP 2019082674 W 20191127; JP 2021530073 A 20191127; KR 20217019710 A 20191127; TW 108143462 A 20191128; US 201917309452 A 20191127