EP 3887569 A2 20211006 - GAS INLET DEVICE FOR A CVD REACTOR
Title (en)
GAS INLET DEVICE FOR A CVD REACTOR
Title (de)
GASEINLASSVORRICHTUNG FÜR EINEN CVD-REAKTOR
Title (fr)
DISPOSITIF D'ENTRÉE DE GAZ POUR UN RÉACTEUR CVD
Publication
Application
Priority
- DE 102018130139 A 20181128
- EP 2019082679 W 20191127
Abstract (en)
[origin: WO2020109361A2] The invention relates to a gas inlet device for a CVD reactor (1) comprising a gas inlet organ that can be fastened to a fastening portion (3) having gas supply conduits (5), said organ comprising multiple gas distribution levels arranged one above the other, each level having a gas distribution wall (6) with gas outlet openings (7) that are fluidically connected to a gas distribution chamber (8) surrounded by the gas distribution wall (6), wherein the mouths (10) of respective gas inlet channels (9.1, 9.2, 9.3, 9.4, 9.5) open into the gas distribution chamber (8) and the gas distribution chambers (8) of different gas distribution levels are separated from one another by a base partition (11). According to the invention, a flow barrier is situated between the mouth (10) of the gas inlet channel (9.1, 9.2, 9.3, 9.4, 9.5) and the gas distribution wall (6). In addition, the gas inlet device consists of multiple discoid gas distribution bodies (4.1, 4.2, 4.3, 4.4) arranged one above the other.
IPC 8 full level
C23C 16/455 (2006.01)
CPC (source: EP KR)
C23C 16/45508 (2013.01 - EP KR); C23C 16/45574 (2013.01 - EP KR); C23C 16/4558 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102018130139 A1 20200528; CN 113330142 A 20210831; EP 3887569 A2 20211006; JP 2022510900 A 20220128; JP 2024079752 A 20240611; JP 7461351 B2 20240403; KR 20210094019 A 20210728; TW 202035777 A 20201001; WO 2020109361 A2 20200604; WO 2020109361 A3 20200903
DOCDB simple family (application)
DE 102018130139 A 20181128; CN 201980089790 A 20191127; EP 19816554 A 20191127; EP 2019082679 W 20191127; JP 2021530047 A 20191127; JP 2024045128 A 20240321; KR 20217019341 A 20191127; TW 108143461 A 20191128