EP 3891776 A2 20211013 - APERTURE DEVICE AND ANALYSER ARRANGEMENT
Title (en)
APERTURE DEVICE AND ANALYSER ARRANGEMENT
Title (de)
BLENDENVORRICHTUNG UND ANALYSATORANORDNUNG
Title (fr)
DISPOSITIF D'OUVERTURE ET AGENCEMENT D'ANALYSEUR
Publication
Application
Priority
- SE 1851526 A 20181207
- SE 1950444 A 20190409
- SE 2019051240 W 20191206
Abstract (en)
[origin: SE1851526A1] An aperture device (31) is described, which is attachable to a lens system (13). The lens system (13) is arranged to form a particle beam of charged particles, emitted from a sample surface (Ss).The aperture device (31) comprises an end surface (S) which is to be arranged facing the sample surface (Ss), at least one aperture (38) arranged in the end surface (S), a length axis (32) which extends through the centre of said at least one aperture (38), and at least one gas outlet (10), which is arranged at a transverse distance (T) perpendicular from the length axis (32), and is arranged to direct gas into a volume between at least one aperture (38) and the sample surface (Ss). The end surface (S) within a distance, equal to 1/3 of the transverse distance (T), perpendicular from the length axis (32) has a variation along the length axis (32) being smaller than 1/6 of the transverse distance (T).
IPC 8 full level
H01J 49/00 (2006.01); G01N 23/227 (2018.01); H01J 37/285 (2006.01)
CPC (source: EP SE)
H01J 37/05 (2013.01 - SE); H01J 37/285 (2013.01 - EP); H01J 49/067 (2013.01 - EP SE); G01N 23/2273 (2013.01 - SE); G01N 2223/085 (2013.01 - SE); H01J 49/484 (2013.01 - EP); H01J 2237/006 (2013.01 - EP); H01J 2237/188 (2013.01 - EP); H01J 2237/2605 (2013.01 - EP); H01J 2237/2855 (2013.01 - EP)
Citation (search report)
See references of WO 2020117122A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3891776 A2 20211013; SE 1851526 A1 20200608; SE 1950444 A1 20200608; SE 542902 C2 20200915
DOCDB simple family (application)
EP 19821306 A 20191206; SE 1851526 A 20181207; SE 1950444 A 20190409