EP 3899420 A1 20211027 - FULL-FIELD HETERODYNE INTERFEROMETER FOR INSPECTING AN OPTICAL SURFACE
Title (en)
FULL-FIELD HETERODYNE INTERFEROMETER FOR INSPECTING AN OPTICAL SURFACE
Title (de)
VOLLFELD-HETERODYNINTERFEROMETER ZUR INSPEKTION EINER OPTISCHEN OBERFLÄCHE
Title (fr)
INTERFÉROMÈTRE HÉTÉRODYNE PLEIN CHAMP POUR INSPECTER UNE SURFACE OPTIQUE
Publication
Application
Priority
- GB 201820515 A 20181217
- GB 2019053395 W 20191129
Abstract (en)
[origin: WO2020128423A1] A device (200) and method for inspecting an optical surface (232) of an optical element (230) or an optical system is presented.The device (200)includes a source of electromagnetic radiation(210), a sensor (240) that includes a plurality of phase detectors forming a two dimensional array, and an interferometric optical arrangement (220) for forming an interference beam. The source of electromagnetic radiation (210) provides a first beam having a first frequency and a second beam having a second frequency.The interferometric optical arrangement (220) has an input optically coupled to the source of electromagnetic radiation and an output optically coupled to the sensor. Each phase detector in the two dimensional array is adapted to perform heterodyne phase demodulation of a different region of the interference beam in parallel with the other phase detectors.
IPC 8 full level
G01B 9/02 (2006.01); G01B 11/16 (2006.01); G01B 11/24 (2006.01); G01M 11/00 (2006.01); G01N 21/88 (2006.01); G01N 21/95 (2006.01)
CPC (source: EP GB)
G01B 9/02 (2013.01 - GB); G01B 9/02003 (2013.01 - EP); G01B 9/02007 (2013.01 - EP GB); G01B 9/02038 (2013.01 - EP); G01B 9/02057 (2013.01 - EP); G01B 11/162 (2013.01 - EP); G01B 11/2441 (2013.01 - EP); G01B 11/30 (2013.01 - GB); G01B 11/303 (2013.01 - GB); G01M 11/005 (2013.01 - EP GB); G01M 11/0271 (2013.01 - EP); G01N 21/45 (2013.01 - EP); G01N 21/95 (2013.01 - EP); G01B 2290/70 (2013.01 - EP); G01N 2021/9511 (2013.01 - EP)
Citation (search report)
See references of WO 2020128423A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020128423 A1 20200625; EP 3899420 A1 20211027; GB 201820515 D0 20190130; GB 2579832 A 20200708; GB 2579832 B 20220309
DOCDB simple family (application)
GB 2019053395 W 20191129; EP 19823930 A 20191129; GB 201820515 A 20181217