EP 3907177 A1 20211110 - PIEZOELECTRIC ACTUATOR PROVIDED WITH A DEFORMABLE STRUCTURE HAVING IMPROVED MECHANICAL PROPERTIES AND FABRICATION METHOD THEREOF
Title (en)
PIEZOELECTRIC ACTUATOR PROVIDED WITH A DEFORMABLE STRUCTURE HAVING IMPROVED MECHANICAL PROPERTIES AND FABRICATION METHOD THEREOF
Title (de)
PIEZOELEKTRISCHER AKTUATOR MIT VERFORMBARER STRUKTUR MIT VERBESSERTEN MECHANISCHEN EIGENSCHAFTEN UND VERFAHREN ZU SEINER HERSTELLUNG
Title (fr)
ACTIONNEUR PIÉZOÉLECTRIQUE DOTÉ D'UNE STRUCTURE DÉFORMABLE AVEC DES PROPRIÉTÉS MÉCANIQUES AMÉLIORÉES ET SON PROCÉDÉ DE FABRICATION
Publication
Application
Priority
IT 202000010261 A 20200507
Abstract (en)
The MEMS actuator (50) is formed by a body (51), which surrounds a cavity (52) and by a deformable structure (54), which is suspended on the cavity and is formed by a movable portion (56) and by a plurality of deformable elements (55). The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator (50) further comprises at least one plurality of actuation structures (80A, 80B), which are supported by the deformable elements (55) and are configured to cause a translation of the movable portion greater than the deformation of each deformable element (55). The actuation structures each have a respective first piezoelectric region (82).
IPC 8 full level
B81B 3/00 (2006.01); H01L 41/09 (2006.01); H04R 7/18 (2006.01); H04R 17/00 (2006.01)
CPC (source: EP US)
B81B 3/0037 (2013.01 - EP); B81B 3/007 (2013.01 - US); B81C 1/00658 (2013.01 - US); F16K 31/005 (2013.01 - US); H04R 1/02 (2013.01 - US); H04R 3/00 (2013.01 - US); H04R 7/04 (2013.01 - US); H04R 7/18 (2013.01 - EP US); H04R 17/00 (2013.01 - EP); H04R 19/02 (2013.01 - US); H04R 31/00 (2013.01 - EP); H10N 30/101 (2024.05 - EP); H10N 30/2044 (2023.02 - EP); B81B 2201/0257 (2013.01 - EP US); B81B 2201/032 (2013.01 - EP); B81B 2201/054 (2013.01 - EP US); B81B 2203/0127 (2013.01 - US); B81B 2203/0315 (2013.01 - US); B81B 2203/0338 (2013.01 - US); B81B 2203/04 (2013.01 - US); B81B 2203/053 (2013.01 - EP); B81B 2207/03 (2013.01 - US); H04R 2201/003 (2013.01 - EP US)
Citation (applicant)
- EP 3490018 A1 20190529 - ST MICROELECTRONICS SRL [IT]
- US 2020092655 A1 20200319 - JIANG KAI-YU [TW], et al
Citation (search report)
- [YA] US 2020092655 A1 20200319 - JIANG KAI-YU [TW], et al
- [Y] EP 3490018 A1 20190529 - ST MICROELECTRONICS SRL [IT]
- [A] CN 108289270 A 20180717 - VIVO COMM TECHNOLOGY CO LTD
- [Y] MURALT P ET AL: "Ferroelectric thin films for micro-sensors and actuators: a review; Ferroelectric thin films for micro-sensors and actuators", JOURNAL OF MICROMECHANICS AND MICROENGINEERING, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 10, no. 2, 1 June 2000 (2000-06-01), pages 136 - 146, XP020068545, ISSN: 0960-1317, DOI: 10.1088/0960-1317/10/2/307
- [A] SCHIFFER MICHAEL ET AL: "Mems Mass Flow Controller for Liquid Fuel Supply to HCCI-Driven Engine", 2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), IEEE, 23 June 2019 (2019-06-23), pages 793 - 796, XP033600091, DOI: 10.1109/TRANSDUCERS.2019.8808483
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3907177 A1 20211110; IT 202000010261 A1 20211107; US 11981558 B2 20240514; US 2021347634 A1 20211111
DOCDB simple family (application)
EP 21171635 A 20210430; IT 202000010261 A 20200507; US 202117240782 A 20210426