EP 3909066 A4 20221109 - SCANNING ELECTRON MICROSCOPE AND A METHOD FOR OVERLAY MONITORING
Title (en)
SCANNING ELECTRON MICROSCOPE AND A METHOD FOR OVERLAY MONITORING
Title (de)
RASTERELEKTRONENMIKROSKOP UND VERFAHREN ZUR ÜBERLAGERUNGSÜBERWACHUNG
Title (fr)
MICROSCOPE ÉLECTRONIQUE À BALAYAGE ET PROCÉDÉ DE SURVEILLANCE DE RECOUVREMENT
Publication
Application
Priority
- US 201962789688 P 20190108
- US 2019068081 W 20191220
Abstract (en)
[origin: WO2020146129A1] A scanning electron microscope and a method for evaluating a sample, the method may include (a) illuminating the sample with a primary electron beam, (b) directing secondary electrons emitted from the sample and propagated above a first scintillator, towards an upper portion of the first scintillator, wherein the first scintillator and a second scintillator are positioned between the sample and a column electrode of the column; wherein the first scintillator is positioned above the second scintillator; (c) detecting the secondary electrons by the first scintillator; (d) directing backscattered electrons emitted from the sample towards a lower portion of the second scintillator; and (e) detecting the backscattered electrons by the second scintillator.
IPC 8 full level
H01J 37/28 (2006.01); H01J 37/244 (2006.01)
CPC (source: EP KR US)
H01J 37/244 (2013.01 - EP KR US); H01J 37/28 (2013.01 - EP KR US); H01J 2237/2443 (2013.01 - EP KR US); H01J 2237/2445 (2013.01 - US); H01J 2237/24475 (2013.01 - EP US); H01J 2237/2448 (2013.01 - EP US)
Citation (search report)
- [A] PL 217173 B1 20140630 - POLITECHNIKA WROCLAWSKA [PL]
- [A] US 2016148782 A1 20160526 - AGEMURA TOSHIHIDE [JP], et al
- [A] US 3628014 A 19711214 - GRUBIC LEE R JR
- [A] CZ 284288 B6 19981014 - PRECIOSA [CZ]
- See references of WO 2020146129A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2020146129 A1 20200716; CN 113614875 A 20211105; CN 113614875 B 20231222; EP 3909066 A1 20211117; EP 3909066 A4 20221109; JP 2022516668 A 20220301; JP 7495939 B2 20240605; KR 20210102988 A 20210820; TW 202034369 A 20200916; TW I837261 B 20240401; US 11646173 B2 20230509; US 2021335569 A1 20211028
DOCDB simple family (application)
US 2019068081 W 20191220; CN 201980087564 A 20191220; EP 19908595 A 20191220; JP 2021539865 A 20191220; KR 20217024643 A 20191220; TW 108147500 A 20191225; US 202117369746 A 20210707