EP 3910662 B1 20230809 - MAGNETRON ASSEMBLY
Title (en)
MAGNETRON ASSEMBLY
Title (de)
MAGNETRONANORDNUNG
Title (fr)
AGENCEMENT MAGNÉTIQUE
Publication
Application
Priority
DE 102020112979 A 20200513
IPC 8 full level
H01J 37/34 (2006.01); C23C 14/35 (2006.01)
CPC (source: EP)
C23C 14/35 (2013.01); H01J 37/3405 (2013.01); H01J 37/342 (2013.01); H01J 37/3455 (2013.01); H01J 37/347 (2013.01)
Citation (examination)
EP 3137646 B1 20200219 - SPUTTERING COMPONENTS INC [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3910662 A1 20211117; EP 3910662 B1 20230809; DE 102020112979 A1 20211118; DE 102020112979 B4 20211223; PL 3910662 T3 20240219
DOCDB simple family (application)
EP 21163946 A 20210322; DE 102020112979 A 20200513; PL 21163946 T 20210322