EP 3912185 A1 20211124 - MEASUREMENT DEVICE AND METHOD FOR DETERMINING THE PROGRESSION OF A BOND WAVE
Title (en)
MEASUREMENT DEVICE AND METHOD FOR DETERMINING THE PROGRESSION OF A BOND WAVE
Title (de)
MESSEINRICHTUNG UND VERFAHREN ZUR ERMITTLUNG DES VERLAUFS EINER BONDWELLE
Title (fr)
DISPOSITIF DE MESURE ET PROCÉDÉ POUR LA DÉTERMINATION DU TRACÉ D'UNE ONDE DE LIAISON
Publication
Application
Priority
EP 2019051244 W 20190118
Abstract (en)
[origin: WO2020147964A1] The invention relates to a measurement device for determining the progression of a bond wave in a gap (3) between a first substrate (2) and a second substrate (4). The invention further relates to a corresponding method.
IPC 8 full level
H01L 21/66 (2006.01); G01B 11/30 (2006.01); G01N 21/00 (2006.01); H01L 21/18 (2006.01); H01L 23/00 (2006.01)
CPC (source: EP KR US)
G01B 11/14 (2013.01 - EP KR US); G01B 11/16 (2013.01 - EP KR US); H01L 21/185 (2013.01 - EP); H01L 21/67288 (2013.01 - US); H01L 22/12 (2013.01 - EP KR US); H01L 24/74 (2013.01 - EP KR); H01L 24/80 (2013.01 - EP KR); H01L 2224/08145 (2013.01 - EP KR); H01L 2224/08225 (2013.01 - EP KR); H01L 2224/08245 (2013.01 - EP KR); H01L 2224/8013 (2013.01 - EP KR); H01L 2224/80908 (2013.01 - EP KR); H01L 2924/3511 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020147964 A1 20200723; CN 113302727 A 20210824; CN 113302727 B 20240906; EP 3912185 A1 20211124; JP 2022522604 A 20220420; JP 7284274 B2 20230530; KR 20210114504 A 20210923; SG 11201911800X A 20200828; TW 202104834 A 20210201; US 12025426 B2 20240702; US 2022026196 A1 20220127
DOCDB simple family (application)
EP 2019051244 W 20190118; CN 201980089391 A 20190118; EP 19701096 A 20190118; JP 2021539930 A 20190118; KR 20217026043 A 20190118; SG 11201911800X A 20190118; TW 109100354 A 20200106; US 201917421267 A 20190118