EP 3916225 B1 20231213 - VACUUM PUMP
Title (en)
VACUUM PUMP
Title (de)
VAKUUMPUMPE
Title (fr)
POMPE À VIDE
Publication
Application
Priority
EP 21199985 A 20210929
Abstract (en)
[origin: JP2023050104A] To provide a vacuum pump capable of preventing remaining of water or moisture content in a pump space.SOLUTION: A vacuum pump includes a pump space, a suction port connected to the pump space, and an exhaust port connected to the pump space. In the pump space, a gas to be conveyed can be conveyed from the suction port to the exhaust port, a chamber to be vacuum-evacuated can be connected to the suction port, and the vacuum pump is configured to supply gas ballast to the pump space. The vacuum pump includes a control unit constituted to calculate a ballast pump period indicating how long the gas ballast must perform pumping to pump discharge the water or water estimated as water existing in the pump space, the control unit is configured to supply the gas ballast during a supply period, and the supply period of the gas ballast depends on the calculated ballast pump period.SELECTED DRAWING: Figure 1
IPC 8 full level
F04B 37/14 (2006.01)
CPC (source: EP)
F04B 37/14 (2013.01); F04B 39/16 (2013.01); F04B 49/065 (2013.01); F04B 2205/07 (2013.01); F04B 2205/09 (2013.01); F04B 2207/043 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3916225 A2 20211201; EP 3916225 A3 20220309; EP 3916225 B1 20231213; JP 2023050104 A 20230410; JP 7492999 B2 20240530
DOCDB simple family (application)
EP 21199985 A 20210929; JP 2022134087 A 20220825