Global Patent Index - EP 3935658 A1

EP 3935658 A1 20220112 - CHARGE NEUTRALIZING APPARATUS

Title (en)

CHARGE NEUTRALIZING APPARATUS

Title (de)

LADUNGSNEUTRALISIERUNGSVORRICHTUNG

Title (fr)

APPAREIL DE NEUTRALISATION DE CHARGE

Publication

EP 3935658 A1 20220112 (EN)

Application

EP 20706508 A 20200225

Priority

  • EP 19160472 A 20190304
  • EP 2020054842 W 20200225

Abstract (en)

[origin: WO2020178068A1] This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device.

IPC 8 full level

H01J 37/04 (2006.01); H01J 37/09 (2006.01); H01J 37/30 (2006.01); H01J 37/32 (2006.01)

CPC (source: EP)

H01J 37/04 (2013.01); H01J 37/09 (2013.01); H01J 37/30 (2013.01); H01J 2237/0041 (2013.01)

Citation (search report)

See references of WO 2020178068A1

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

DOCDB simple family (publication)

WO 2020178068 A1 20200910; WO 2020178068 A9 20210701; EP 3935658 A1 20220112; TW 202103201 A 20210116

DOCDB simple family (application)

EP 2020054842 W 20200225; EP 20706508 A 20200225; TW 109107137 A 20200304