EP 3935658 A1 20220112 - CHARGE NEUTRALIZING APPARATUS
Title (en)
CHARGE NEUTRALIZING APPARATUS
Title (de)
LADUNGSNEUTRALISIERUNGSVORRICHTUNG
Title (fr)
APPAREIL DE NEUTRALISATION DE CHARGE
Publication
Application
Priority
- EP 19160472 A 20190304
- EP 2020054842 W 20200225
Abstract (en)
[origin: WO2020178068A1] This invention relates to a charge neutralizing apparatus for a processing chamber of an ion implantation device.
IPC 8 full level
H01J 37/04 (2006.01); H01J 37/09 (2006.01); H01J 37/30 (2006.01); H01J 37/32 (2006.01)
CPC (source: EP)
H01J 37/04 (2013.01); H01J 37/09 (2013.01); H01J 37/30 (2013.01); H01J 2237/0041 (2013.01)
Citation (search report)
See references of WO 2020178068A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2020178068 A1 20200910; WO 2020178068 A9 20210701; EP 3935658 A1 20220112; TW 202103201 A 20210116
DOCDB simple family (application)
EP 2020054842 W 20200225; EP 20706508 A 20200225; TW 109107137 A 20200304