EP 3939076 A1 20220119 - METHOD FOR TRANSFERRING A USEFUL LAYER ONTO A SUPPORT SUBSTRATE
Title (en)
METHOD FOR TRANSFERRING A USEFUL LAYER ONTO A SUPPORT SUBSTRATE
Title (de)
VERFAHREN ZUR ÜBERTRAGUNG EINER NÜTZLICHEN SCHICHT AUF EIN TRÄGERSUBSTRAT
Title (fr)
PROCEDE DE TRANSFERT D'UNE COUCHE UTILE SUR UN SUBSTRAT SUPPORT
Publication
Application
Priority
- FR 1902668 A 20190315
- FR 2020050367 W 20200226
Abstract (en)
[origin: WO2020188167A1] The invention relates to a method for transferring an useful layer onto a support substrate, said method involving the following steps: a) providing a donor substrate comprising a buried fragile plane, the useful layer being delimited by a front face of the donor substrate and the buried fragile plane; b) providing a support substrate; c) joining the donor substrate by its front face to the support substrate over a bonding interface to form a bonded structure; d) annealing the bonded structure to increase the break-off level of the buried fragile plane; the transfer method being characterized in that: - a predetermined stress is applied to the buried fragile plane during the annealing step d) for a period of time, the predetermined stress being selected so as to initiate the fracture wave when a given break-off level is reached; - at the end of said period of time, when the given break-off level has been reached, the predetermined stress causes the initiation and self-propagation of the fracture wave along the buried fragile plane, leading to the transfer of the useful layer onto the support substrate.
IPC 8 full level
H01L 21/762 (2006.01)
CPC (source: EP KR US)
H01L 21/76254 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3093858 A1 20200918; FR 3093858 B1 20210305; CN 113574654 A 20211029; EP 3939076 A1 20220119; JP 2022526250 A 20220524; KR 20210138051 A 20211118; SG 11202109798U A 20211028; TW 202036782 A 20201001; TW I811528 B 20230811; US 2022172983 A1 20220602; WO 2020188167 A1 20200924
DOCDB simple family (application)
FR 1902668 A 20190315; CN 202080016649 A 20200226; EP 20713728 A 20200226; FR 2020050367 W 20200226; JP 2021555272 A 20200226; KR 20217032705 A 20200226; SG 11202109798U A 20200226; TW 109105909 A 20200224; US 202017436532 A 20200226