EP 3939078 A1 20220119 - METHOD FOR TRANSFERRING A USEFUL LAYER TO A CARRIER SUBSTRATE
Title (en)
METHOD FOR TRANSFERRING A USEFUL LAYER TO A CARRIER SUBSTRATE
Title (de)
VERFAHREN ZUR ÜBERTRAGUNG EINER NUTZSCHICHT AUF EIN TRÄGERSUBSTRAT
Title (fr)
PROCEDE DE TRANSFERT D'UNE COUCHE UTILE SUR UNE SUBSTRAT SUPPORT
Publication
Application
Priority
- FR 1902674 A 20190315
- FR 2020050369 W 20200226
Abstract (en)
[origin: WO2020188169A1] The invention relates to a method for transferring a useful layer to a carrier substrate, comprising the following steps: a) providing a donor substrate comprising a buried weakened plane, the useful layer being delimited by a front face of the donor substrate and the buried weakened plane; b) providing a carrier substrate; c) joining the donor substrate by its front face to the carrier substrate along a bonding interface to form a bonded structure; d) annealing the bonded structure to apply a weakening thermal budget thereto and bring the buried weakened plane to a defined level of weakening, said anneal reaching a maximum hold temperature; e) initiating a splitting wave in the buried weakened plane by applying a stress to the bonded structure, the splitting wave propagating along the buried weakened plane in a self-sustained manner to lead to the useful layer being transferred to the carrier substrate. Step e) is initiated when the bonded structure experiences a thermal gradient defining a hot region and a cool region of said bonded structure, the stress being locally exerted in the cool region, and the hot region experiencing a temperature lower than the maximum hold temperature.
IPC 8 full level
H01L 21/762 (2006.01)
CPC (source: EP KR US)
H01L 21/3043 (2013.01 - US); H01L 21/76254 (2013.01 - EP KR US); H01L 21/7806 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3093859 A1 20200918; FR 3093859 B1 20210212; CN 113491004 A 20211008; CN 113491004 B 20240913; EP 3939078 A1 20220119; JP 2022527048 A 20220530; JP 7500911 B2 20240618; KR 20210134784 A 20211110; SG 11202109921Q A 20211028; TW 202036784 A 20201001; TW I824112 B 20231201; US 11876015 B2 20240116; US 2022157650 A1 20220519; WO 2020188169 A1 20200924
DOCDB simple family (application)
FR 1902674 A 20190315; CN 202080016748 A 20200226; EP 20713948 A 20200226; FR 2020050369 W 20200226; JP 2021555273 A 20200226; KR 20217032935 A 20200226; SG 11202109921Q A 20200226; TW 109105911 A 20200224; US 202017435631 A 20200226