EP 3947280 A1 20220209 - METHOD FOR PRODUCING AND CLASSIFYING POLYCRYSTALLINE SILICON
Title (en)
METHOD FOR PRODUCING AND CLASSIFYING POLYCRYSTALLINE SILICON
Title (de)
VERFAHREN ZUR HERSTELLUNG UND KLASSIFIZIERUNG VON POLYKRISTALLINEM SILICIUM
Title (fr)
PROCÉDÉ DE PRODUCTION ET DE CLASSIFICATION DE SILICIUM POLYCRISTALLIN
Publication
Application
Priority
EP 2019085569 W 20191217
Abstract (en)
[origin: WO2021121558A1] The invention relates to a method for producing and classifying polycrystalline silicon, comprising the following steps: - making a polycrystalline silicon rod by introducing a reaction gas, which contains, in addition to hydrogen, silane and/or at least one halosilane, into a reaction chamber of a vapour deposition reactor, wherein the reaction chamber contains at least one heated filament rod, on which silicon is deposited forming the polycrystalline silicon rod, - removing the silicon rod from the reactor, - where necessary comminuting the silicon rod to obtain silicon fragments, - creating at least one two-dimensional and/or three-dimensional image of at least one sub-region of the silicon rod or of at least one silicon fragment and selecting at least one analysis region for each created image, - generating at least two surface structure characteristics for each analysis region by means of image processing methods, wherein each surface structure characteristic is generated using another image processing method, - combining the surface structure characteristics to form a morphology characteristic. The silicon rods or the silicon fragments are classified in accordance with the morphology characteristic and provided for various further processing steps.
IPC 8 full level
C01B 33/035 (2006.01); G06T 7/00 (2017.01)
CPC (source: EP KR US)
C01B 33/035 (2013.01 - EP KR US); G06T 7/0004 (2013.01 - EP KR); G06T 7/521 (2017.01 - EP KR); G06V 10/764 (2022.01 - US); G06T 2207/10028 (2013.01 - EP KR); G06T 2207/30148 (2013.01 - EP KR)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2021121558 A1 20210624; CN 113727944 A 20211130; EP 3947280 A1 20220209; JP 2022537014 A 20220823; JP 7342147 B2 20230911; KR 102657489 B1 20240412; KR 20220002624 A 20220106; TW 202126578 A 20210716; TW I758989 B 20220321; US 2023011307 A1 20230112
DOCDB simple family (application)
EP 2019085569 W 20191217; CN 201980095560 A 20191217; EP 19829497 A 20191217; JP 2021568013 A 20191217; KR 20217039201 A 20191217; TW 109142752 A 20201204; US 201917781410 A 20191217