EP 3951828 A1 20220209 - AUTOMATIC ASTIGMATISM ELIMINATION ELECTRONIC GUN, AND AUTOMATIC ASTIGMATISM ELIMINATION METHOD OF ELECTRONIC GUN
Title (en)
AUTOMATIC ASTIGMATISM ELIMINATION ELECTRONIC GUN, AND AUTOMATIC ASTIGMATISM ELIMINATION METHOD OF ELECTRONIC GUN
Title (de)
ELEKTRONISCHE PISTOLE MIT AUTOMATISCHER ASTIGMATISMUSBESEITIGUNG UND VERFAHREN ZUR AUTOMATISCHEN ASTIGMATISMUSBESEITIGUNG EINER ELEKTRONISCHEN PISTOLE
Title (fr)
CANON ÉLECTRONIQUE À ÉLIMINATION AUTOMATIQUE DE L'ASTIGMATISME ET PROCÉDÉ D'ÉLIMINATION AUTOMATIQUE DE L'ASTIGMATISME D'UN CANON ÉLECTRONIQUE
Publication
Application
Priority
- CN 202010425026 A 20200519
- CN 2020120391 W 20201012
Abstract (en)
The present invention discloses an automatic anastigmatic electron gun and an automatic anastigmatic method for an electron gun, which use a split Rogowski coil as the detecting element to realize non-contact detection of electron beam spot morphology in combination with the pulse electron beam technology. The split Rogowski coil uses differential-mode signals as the output and the minimum value of detection signals as the correction target of the anastigmatic device, which simplifies the processing method of detection signals, eliminates the influence of common-mode interference signals, and improves detection sensitivity and precision. The "optimum" exciting current of the anastigmatic device is searched by axes to realize quick search. The weighted values of the amplitude and the average value of the detection signals can reflect the difference of electron beam spot morphology more fully. With the integrated data of the weighted values as the judgment basis, two rounds of search and confirmation of the "optimum" value further improve the reliability and reduce the randomness.
IPC 8 full level
H01J 29/48 (2006.01); H01J 29/56 (2006.01)
CPC (source: CN EP RU)
B33Y 30/00 (2014.12 - EP); H01J 29/48 (2013.01 - RU); H01J 29/485 (2013.01 - CN); H01J 29/566 (2013.01 - CN); H01J 37/153 (2013.01 - EP); H01J 37/3007 (2013.01 - EP); H01J 37/304 (2013.01 - EP); H01J 2229/48 (2013.01 - CN); H01J 2237/1532 (2013.01 - EP); H01J 2237/30472 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3951828 A1 20220209; EP 3951828 A4 20230621; EP 3951828 B1 20231227; CN 111477529 A 20200731; CN 111477529 B 20240514; RU 2769346 C1 20220330; WO 2021232659 A1 20211125
DOCDB simple family (application)
EP 20916250 A 20201012; CN 202010425026 A 20200519; CN 2020120391 W 20201012; RU 2021122895 A 20201012