EP 3957699 A4 20221228 - SPHERICAL INORGANIC PARTICLES HAVING SURFACE BUMPS FORMED THEREON, AND METHOD OF MANUFACTURING SAME
Title (en)
SPHERICAL INORGANIC PARTICLES HAVING SURFACE BUMPS FORMED THEREON, AND METHOD OF MANUFACTURING SAME
Title (de)
KUGELFÖRMIGE ANORGANISCHE TEILCHEN MIT DARAUF GEFORMTEN OBERFLÄCHENWÖLBUNGEN UND VERFAHREN ZU IHRER HERSTELLUNG
Title (fr)
PARTICULES INORGANIQUES SPHÉRIQUES COMPORTANT DES BOSSES DE SURFACE FORMÉES SUR CELLES-CI, ET LEUR PROCÉDÉ DE FABRICATION
Publication
Application
Priority
- KR 20200023993 A 20200227
- KR 2021002502 W 20210226
Abstract (en)
[origin: EP3957699A2] The inorganic particle according to the present invention is composed of aggregation of crystalline and amorphous small particles and has a spherical and smooth surface. The spherical appearance, low crystallinity and narrow particle size distribution of inorganic particle are more advantageous in reducing scratch defects in the CMP process. In addition, since the small particles on the surface of the inorganic particle provide more active sites, the inorganic particle has an excellent removal rate, so it is advantageous as a next-generation CMP abrasive.
IPC 8 full level
C09K 3/14 (2006.01)
CPC (source: EP KR US)
C09G 1/02 (2013.01 - US); C09K 3/1409 (2013.01 - EP KR US); C09K 3/1436 (2013.01 - EP); C09K 3/1463 (2013.01 - EP KR US)
Citation (search report)
- [X] WO 2009040597 A1 20090402 - CHIMICO FARMACEUTICO SAMMARINE [SM], et al
- [XA] ZHANG HEPENG ET AL: "Controllable synthesis of spherical cerium oxide particles", RSC ADVANCES, vol. 6, no. 37, 1 January 2016 (2016-01-01), pages 30956 - 30962, XP055982369, DOI: 10.1039/C6RA01680D
- [XA] FU ZHOU ET AL: "Controllable synthesis of spherical cerium oxide particles", THE JOURNAL OF PHYSICAL CHEMISTRY C, vol. 111, no. 4, 1 February 2007 (2007-02-01), US, pages 1651 - 1657, XP055719730, ISSN: 1932-7447, DOI: 10.1021/jp0660435
- See references of WO 2021172954A2
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
EP 3957699 A2 20220223; EP 3957699 A4 20221228; CN 113891924 A 20220104; CN 113891924 B 20230331; JP 2022534203 A 20220728; JP 7281113 B2 20230525; KR 102261151 B1 20210607; TW 202134183 A 20210916; US 2022235252 A1 20220728; WO 2021172954 A2 20210902; WO 2021172954 A3 20211021
DOCDB simple family (application)
EP 21760538 A 20210226; CN 202180003490 A 20210226; JP 2021568911 A 20210226; KR 20200023993 A 20200227; KR 2021002502 W 20210226; TW 110107037 A 20210226; US 202117611806 A 20210226