EP 3962241 A1 20220302 - AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
Title (en)
AN ILLUMINATION SOURCE AND ASSOCIATED METROLOGY APPARATUS
Title (de)
BELEUCHTUNGSQUELLE UND ZUGEHÖRIGE MESSVORRICHTUNG
Title (fr)
SOURCE D'ÉCLAIRAGE ET APPAREIL DE MÉTROLOGIE ASSOCIÉ
Publication
Application
Priority
EP 20192841 A 20200826
Abstract (en)
Disclosed is an illumination source comprising a gas delivery system being configured to provide a gas target for generating an emitted radiation at an interaction region of the gas target, and an interferometer for illuminating at least part of the gas target with an interferometer radiation to measure a property of the gas target.
IPC 8 full level
H05G 2/00 (2006.01)
CPC (source: EP)
H05G 2/003 (2013.01); H05G 2/008 (2013.01)
Citation (applicant)
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- LEMAILLET ET AL.: "Intercomparison between optical and X-ray scatterometry measurements of FinFET structures", PROC. OF SPIE, 2013, pages 8681, XP055267051, DOI: 10.1117/12.2011144
- TAKEDA: "Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry", J.OPT.SOC.AM., vol. 72, no. 1, 1982, pages 156, XP000570893, DOI: 10.1364/JOSA.72.000156
Citation (search report)
- [A] US 2013119232 A1 20130516 - MORIYA MASATO [JP], et al
- [A] US 2008237498 A1 20081002 - MACFARLANE JOSEPH J [US]
- [XA] FIEDOROWICZ H ET AL: "X-RAY LASER EXPERIMENTS USING LASER-IRRADIATED GAS PUFF TARGETS AT THE ASTERIX IV FACILITY", PROCEEDINGS OF SPIE, IEEE, US, vol. 2520, 10 July 1995 (1995-07-10), pages 55 - 68, XP001036519, ISBN: 978-1-62841-730-2, DOI: 10.1117/12.221659
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
EP 20192841 A 20200826