EP 3966608 A1 20220316 - MIRROR DEVICE FOR AN INTERFEROMETER DEVICE, INTERFEROMETER DEVICE AND METHOD FOR PRODUCING A MIRROR DEVICE
Title (en)
MIRROR DEVICE FOR AN INTERFEROMETER DEVICE, INTERFEROMETER DEVICE AND METHOD FOR PRODUCING A MIRROR DEVICE
Title (de)
SPIEGELEINRICHTUNG FÜR EINE INTERFEROMETEREINRICHTUNG, INTERFEROMETEREINRICHTUNG UND VERFAHREN ZUM HERSTELLEN EINER SPIEGELEINRICHTUNG
Title (fr)
DISPOSITIF MIROIR POUR DISPOSITIF INTERFÉROMÉTRIQUE, DISPOSITIF INTERFÉROMÉTRIQUE ET PROCÉDÉ POUR RÉALISER UN DISPOSITIF MIROIR
Publication
Application
Priority
- DE 102019206758 A 20190510
- EP 2020061876 W 20200429
Abstract (en)
[origin: WO2020229180A1] The invention relates to a mirror device (1) for an interferometer device (1), comprising: a first mirror layer (2) and a second mirror layer (3), which are arranged in parallel on top of one another and spaced apart from one another by a mirror layer spacing (d23), wherein the mirror layer spacing (d23) forms an intermediate space (5) between the first and the second mirror layer (2, 3), and wherein the intermediate space (5) includes a gas or a vacuum; and at least one spacing structure (4) which extends at least partially between the first and the second mirror layer (2, 3), and wherein the spacing structure (4) has a material that is the same as or different from the first and/or second mirror layer (2, 3).
IPC 8 full level
G02B 5/28 (2006.01); G01J 3/26 (2006.01); G02B 5/08 (2006.01); G02B 26/00 (2006.01)
CPC (source: EP US)
G01J 3/26 (2013.01 - EP US); G02B 5/0816 (2013.01 - EP US); G02B 5/284 (2013.01 - EP US); G02B 26/001 (2013.01 - EP US); G01J 2003/1247 (2013.01 - US)
Citation (search report)
See references of WO 2020229180A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019206758 A1 20201112; CN 113785227 A 20211210; EP 3966608 A1 20220316; US 2022221709 A1 20220714; WO 2020229180 A1 20201119
DOCDB simple family (application)
DE 102019206758 A 20190510; CN 202080034778 A 20200429; EP 2020061876 W 20200429; EP 20723095 A 20200429; US 202017609578 A 20200429