EP 3973258 A1 20220330 - INTERFEROMETER DEVICE AND METHOD FOR PRODUCING AN INTERFEROMETER DEVICE
Title (en)
INTERFEROMETER DEVICE AND METHOD FOR PRODUCING AN INTERFEROMETER DEVICE
Title (de)
INTERFEROMETEREINRICHTUNG UND VERFAHREN ZUM HERSTELLEN EINER INTERFEROMETEREINRICHTUNG
Title (fr)
DISPOSITIF INTERFÉROMÉTRIQUE ET PROCÉDÉ DE FABRICATION D'UN DISPOSITIF INTERFÉROMÉTRIQUE
Publication
Application
Priority
- DE 102019207383 A 20190521
- EP 2020063574 W 20200515
Abstract (en)
[origin: WO2020234139A1] The present invention relates to an interferometer device (10), comprising: an interferometer unit (1), which has a base substrate (2), a Fabry-Perot unit (FPI) and a detector device (3); and a housing (G), which comprises a bottom plate (BP) and a cover structure (4), wherein: the cover structure (4) is arranged on the bottom plate (BP) and encloses a second cavity (K2) between the cover structure (4) and the bottom plate (BP); the bottom plate (BP) or the cover structure (4) comprises an opening (5), which is surrounded by side walls (5a), which extend perpendicularly to a surface of the bottom plate (BP) or the cover structure (4); and the interferometer unit (1) is arranged in the second cavity (K2) and in a light incidence direction (L) through the opening (5) such that the Fabry-Perot unit (FPI) of the interferometer unit (1) faces the opening (5).
IPC 8 full level
CPC (source: CN EP)
G01J 3/0205 (2013.01 - CN); G01J 3/0262 (2013.01 - EP); G01J 3/0291 (2013.01 - EP); G01J 3/26 (2013.01 - EP); G01J 3/45 (2013.01 - CN); G02F 1/21 (2013.01 - CN); G01J 3/0289 (2013.01 - EP); G01J 2003/1213 (2013.01 - EP)
Citation (search report)
See references of WO 2020234139A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019207383 A1 20201126; CN 113825988 A 20211221; EP 3973258 A1 20220330; WO 2020234139 A1 20201126
DOCDB simple family (application)
DE 102019207383 A 20190521; CN 202080037708 A 20200515; EP 2020063574 W 20200515; EP 20730194 A 20200515