EP 3992142 A4 20230104 - SILICON NANOWIRE CHIP AND SILICON NANOWIRE CHIP-BASED MASS SPECTRUM DETECTION METHOD
Title (en)
SILICON NANOWIRE CHIP AND SILICON NANOWIRE CHIP-BASED MASS SPECTRUM DETECTION METHOD
Title (de)
SILICIUMNANODRAHT-CHIP UND AUF SILICIUMNANODRAHT-CHIP BASIERENDES MASSENSPEKTRUMDETEKTIONSVERFAHREN
Title (fr)
PUCE DE NANOFIL DE SILICIUM ET PROCÉDÉ DE DÉTECTION DE SPECTRE DE MASSE BASÉ SUR UNE PUCE DE NANOFIL DE SILICIUM
Publication
Application
Priority
- CN 201910579528 A 20190628
- CN 2020092566 W 20200527
Abstract (en)
[origin: EP3992142A1] The present disclosure discloses a silicon nanowire chip and silicon nanowire chip-based mass spectrometry detection method. The detection method includes the following steps: step 1 of manufacturing a silicon nanowire chip, comprising: subjecting a monocrystalline silicon wafer to a surface washing pretreatment, a metal-assisted etching and a post-alkali etching to obtain a silicon nanowire chip with a tip, and performing a surface chemical modification or a nanomaterial modification on the silicon nanowire chip; step 2 of evaluating mass spectrometry performance of the silicon nanowire chip; and step 3 of performing a tip-contact sampling and in-situ ionization mass spectrometry detection. The present disclosure fully utilizes the nano-structure properties and semiconductor properties of the silicon nanowire chip to integrate contact-type extractive transfer and matrix-free mass spectrometry detection, the collection, pretreatment and detection processes of complex samples are thus greatly simplified. The manufactured silicon nanowire chip of the present disclosure is capable of having functions of adsorption, extraction and mass spectrometry detection simultaneously, and it also can retain in-situ information of samples with spatial heterogeneity.
IPC 8 full level
H01J 49/04 (2006.01); B81B 1/00 (2006.01); B81B 7/04 (2006.01); B81C 1/00 (2006.01); G01N 27/62 (2021.01); G01N 27/68 (2006.01)
CPC (source: CN EP KR US)
B81B 1/00 (2013.01 - CN KR); B81B 7/04 (2013.01 - CN KR); B81C 1/00031 (2013.01 - CN KR); B81C 1/00111 (2013.01 - CN EP KR); B81C 1/00206 (2013.01 - CN EP KR); G01N 27/62 (2013.01 - CN); G01N 27/623 (2021.01 - KR US); G01N 27/64 (2013.01 - KR US); G01N 27/68 (2013.01 - EP KR); H01J 49/0418 (2013.01 - EP KR US); B81B 2203/0361 (2013.01 - CN KR); B81B 2207/056 (2013.01 - CN KR); B81C 2201/0133 (2013.01 - EP KR)
Citation (search report)
- [XYI] CHEN XIAOMING ET AL: "Tip-Enhanced Photoinduced Electron Transfer and Ionization on Vertical Silicon Nanowires", APPLIED MATERIALS & INTERFACES, vol. 10, no. 17, 12 April 2018 (2018-04-12), US, pages 14389 - 14398, XP055772922, ISSN: 1944-8244, Retrieved from the Internet <URL:https://pubs.acs.org/doi/pdf/10.1021/acsami.8b00506> DOI: 10.1021/acsami.8b00506 & CHEN XIAOMING ET AL: "Supporting Information for Tip-enhanced Photoinduced Electron Transfer and Ionization on Vertical Silicon Nanowires", ACS APPL. MATER. INTERFACES, vol. 10, no. 17, 12 April 2018 (2018-04-12), pages 14389 - 14398, XP055947844, Retrieved from the Internet <URL:https://pubs.acs.org/doi/suppl/10.1021/acsami.8b00506/suppl_file/am8b00506_si_001.pdf> DOI: 10.1021/acsami.8b00506
- [Y] LU MINGHUA ET AL: "Nanomaterials as Assisted Matrix of Laser Desorption/Ionization Time-of-Flight Mass Spectrometry for the Analysis of Small Molecules", NANOMATERIALS, vol. 7, no. 4, 21 April 2017 (2017-04-21), pages 87, XP093002092, ISSN: 2079-4991, DOI: 10.3390/nano7040087
- [Y] PICCA ROSARIA ANNA ET AL: "Mechanisms of Nanophase-Induced Desorption in LDI-MS. A Short Review", NANOMATERIALS, vol. 7, no. 4, 2 April 2017 (2017-04-02), pages 75, XP055978064, DOI: 10.3390/nano7040075
- [Y] ELLIS SHANE R ET AL: "Surface analysis of lipids by mass spectrometry: More than just imaging", PROGRESS IN LIPID RESEARCH, vol. 52, no. 4, 24 April 2013 (2013-04-24), pages 329 - 353, XP028769967, ISSN: 0163-7827, DOI: 10.1016/J.PLIPRES.2013.04.005
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3992142 A1 20220504; EP 3992142 A4 20230104; CN 110203876 A 20190906; CN 110203876 B 20220218; JP 2022539463 A 20220909; JP 7300017 B2 20230628; KR 20220031652 A 20220311; US 2022359180 A1 20221110; WO 2020259186 A1 20201230; WO 2020259186 A9 20210520
DOCDB simple family (application)
EP 20832586 A 20200527; CN 201910579528 A 20190628; CN 2020092566 W 20200527; JP 2021578254 A 20200527; KR 20227003459 A 20200527; US 202017621584 A 20200527