EP 3997256 A1 20220518 - GAS-INLET ELEMENT FOR A CVD REACTOR
Title (en)
GAS-INLET ELEMENT FOR A CVD REACTOR
Title (de)
GASEINLASSORGAN FÜR EINEN CVD-REAKTOR
Title (fr)
ORGANE D'ADMISSION DE GAZ POUR UN REACTEUR DE DEPOT CHIMIQUE EN PHASE VAPEUR
Publication
Application
Priority
- DE 102019119019 A 20190712
- EP 2020069473 W 20200710
Abstract (en)
[origin: WO2021009019A1] The invention relates to a gas-outlet area (16) of a gas-inlet element (2) for a CVD reactor (1) or a shielding plate (14) for a gas-inlet element (2), which has a multiplicity of gas-outlet openings (7, 17) arranged around a centre (10), wherein the centre points (8') of the gas-outlet openings (7, 17) lie at the corner points (8') of polygonal, identically formed cells (8) having a geometrical centre point (9), wherein the positioning and the length of the edges (8'') of the cells (8) are defined by crossing reference lines (13, 13, 13', 13''), the reference lines (13, 13', 13'') are assigned to at least two families of lines, and the reference lines respectively of a family of lines extend in a straight line and parallel to one another over the entire gas-outlet area. According to the invention, the centre (10) is at a distance from the corner point (8') equivalent to one third ± 10 percent of the length of the edge.
IPC 8 full level
C23C 16/455 (2006.01); C30B 25/14 (2006.01)
CPC (source: EP KR US)
C23C 16/45565 (2013.01 - EP KR US); C30B 25/14 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2021009019A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019119019 A1 20210114; CN 114269968 A 20220401; EP 3997256 A1 20220518; JP 2022540179 A 20220914; KR 20220032596 A 20220315; TW 202118892 A 20210516; US 2022259737 A1 20220818; WO 2021009019 A1 20210121
DOCDB simple family (application)
DE 102019119019 A 20190712; CN 202080059285 A 20200710; EP 2020069473 W 20200710; EP 20742191 A 20200710; JP 2022501030 A 20200710; KR 20227004440 A 20200710; TW 109123316 A 20200710; US 202017626113 A 20200710