EP 3997505 A1 20220518 - METHOD AND MICROSCOPE WITH A CORRECTION DEVICE FOR CORRECTING ABERRATION-INDUCED IMAGING ERRORS
Title (en)
METHOD AND MICROSCOPE WITH A CORRECTION DEVICE FOR CORRECTING ABERRATION-INDUCED IMAGING ERRORS
Title (de)
VERFAHREN UND MIKROSKOP MIT EINER KORREKTURVORRICHTUNG ZUR KORREKTUR VON ABERRATIONSINDUZIERTEN ABBILDUNGSFEHLERN
Title (fr)
PROCÉDÉ ET MICROSCOPE COMPRENANT UN DISPOSITIF DE CORRECTION POUR CORRIGER DES DÉFAUTS D'IMAGES DUS AUX ABERRATIONS
Publication
Application
Priority
- DE 102019118446 A 20190708
- EP 2020068501 W 20200701
Abstract (en)
[origin: WO2021004850A1] The invention relates to a method for correcting aberration-induced imaging errors in an optical system, which comprises an objective lens (14) and adaptive optics (18), in which method the light (5) and a specimen (20) are selected such that, as the light (5) acts on the specimen (20), a measuring signal (28) from the specimen (20) is reduced, a relative change in the measuring signal (28) depending on an intensity of the light (5). The measuring signal (28) from a focus region of the optical system in the specimen (20) is captured over a first and a later, second period (38, 37) to determine a first and a second measured value. The light (5) is focussed by the optical system in the focus region over a third period (39) overlapping with the first and/or second period. A numerical value for the relative change in the measuring signal (28) is determined from the first and the second measured values and is used as a metric to be optimised in controlling the adaptive optics (18).
IPC 8 full level
G02B 7/40 (2021.01); G02B 21/00 (2006.01); G02B 21/24 (2006.01); G02B 26/06 (2006.01); G02B 27/00 (2006.01); G02B 27/58 (2006.01)
CPC (source: CN EP US)
G01N 21/01 (2013.01 - CN); G01N 21/6402 (2013.01 - CN US); G01N 21/6408 (2013.01 - CN US); G01N 21/6428 (2013.01 - CN US); G01N 21/6458 (2013.01 - CN US); G02B 21/002 (2013.01 - CN); G02B 21/006 (2013.01 - EP); G02B 21/0076 (2013.01 - EP US); G02B 21/0084 (2013.01 - EP); G02B 21/06 (2013.01 - CN); G02B 26/06 (2013.01 - EP); G01N 2021/6439 (2013.01 - CN US); G02B 7/40 (2013.01 - EP); G02B 21/241 (2013.01 - EP); G02B 27/0025 (2013.01 - EP); G02B 27/58 (2013.01 - EP); G02B 2207/114 (2013.01 - EP)
Citation (search report)
See references of WO 2021004850A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019118446 A1 20210114; CN 114424049 A 20220429; EP 3997505 A1 20220518; JP 2022539474 A 20220909; US 2022364994 A1 20221117; WO 2021004850 A1 20210114
DOCDB simple family (application)
DE 102019118446 A 20190708; CN 202080062711 A 20200701; EP 2020068501 W 20200701; EP 20739894 A 20200701; JP 2022501140 A 20200701; US 202017624920 A 20200701