EP 4005092 A1 20220601 - MODULATION DEVICE, CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM AND METHOD
Title (en)
MODULATION DEVICE, CONTROL DEVICE, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM AND METHOD
Title (de)
MODULATIONSVORRICHTUNG, ANSTEUERVORRICHTUNG, OPTISCHES SYSTEM, LITHOGRAPHIEANLAGE UND VERFAHREN
Title (fr)
DISPOSITIF DE MODULATION, DISPOSITIF DE COMMANDE, SYSTÈME OPTIQUE, SYSTÈME DE LITHOGRAPHIE ET PROCÉDÉ
Publication
Application
Priority
- DE 102019211477 A 20190731
- EP 2020069899 W 20200714
Abstract (en)
[origin: WO2021018573A1] The invention relates to a modulation device (100) for generating a 1-bit wide modulation signal (PWM) according to an N-bit wide input signal (I), comprising a signal splitter (110) for generating an M-bit wide first sub-signal (Xh) having M higher-value bits of the input signal (I) and for generating an L-bit wide second sub-signal (Xl) having L lower-value bits of the input signal, wherein L = N - M, a first modulation unit (120) for generating a 1-bit wide pulse-density modulation signal (PDM) according to the second sub-signal (Xl), an adding unit (130) for generating an M-bit wide addition signal (Xs) according to the first sub-signal (Xh) and the pulse-density modulation signal (PDM), and comprising a second modulation unit (140) for generating the 1-bit wide modulation signal (PWM) according to the addition signal (Xs).
IPC 8 full level
H03K 7/08 (2006.01); H03K 11/00 (2006.01)
CPC (source: CN EP US)
G02B 27/283 (2013.01 - US); G03F 7/70033 (2013.01 - CN); G03F 7/70483 (2013.01 - CN); H03K 7/08 (2013.01 - CN EP US); H03K 11/00 (2013.01 - CN EP); H04B 10/524 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2021018573 A1 20210204; CN 114223134 A 20220322; DE 102019211477 A1 20210204; EP 4005092 A1 20220601; US 11901948 B2 20240213; US 2022149950 A1 20220512
DOCDB simple family (application)
EP 2020069899 W 20200714; CN 202080055084 A 20200714; DE 102019211477 A 20190731; EP 20743618 A 20200714; US 202217583396 A 20220125