EP 4015674 A1 20220622 - SYSTEM FOR A SURFACE TREATMENT OF A SUBSTRATE WITH A FLUID
Title (en)
SYSTEM FOR A SURFACE TREATMENT OF A SUBSTRATE WITH A FLUID
Title (de)
SYSTEM ZUR OBERFLÄCHENBEHANDLUNG EINES SUBSTRATS MIT EINEM FLUID
Title (fr)
SYSTÈME DE TRAITEMENT D'UNE SURFACE D'UN SUBSTRAT AVEC UN FLUIDE
Publication
Application
Priority
EP 20214473 A 20201216
Abstract (en)
The present application relates to a system for a surface treatment of a substrate with a fluid and a method for a surface treatment of a substrate with a fluid.The system for a surface treatment of a substrate with a fluid comprises a substrate holder, a cover, and a treatment chamber. The substrate holder is configured to hold the substrate to be treated. The cover is attachable to the substrate holder and configured to cover the substrate at least partially. The treatment chamber comprises a rinsing unit to rinse the cover. The rinsing unit is configured to handle the cover relative to the substrate holder. The treatment chamber further comprises a drying unit to dry the cover.
IPC 8 full level
C25D 5/48 (2006.01); C25D 17/08 (2006.01); C25D 21/08 (2006.01)
CPC (source: EP)
C25D 5/48 (2013.01); C25D 17/08 (2013.01); C25D 21/08 (2013.01)
Citation (search report)
- [X] US 2019301049 A1 20191003 - ZIMMERMAN NOLAN [US], et al
- [X] US 2004020781 A1 20040205 - DORDI YEZDI [US], et al
- [X] US 2008296166 A1 20081204 - WOODS CARL A [US], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 4015674 A1 20220622; TW 202228230 A 20220716; WO 2022128482 A1 20220623
DOCDB simple family (application)
EP 20214473 A 20201216; EP 2021083819 W 20211201; TW 110146489 A 20211213