EP 4022669 A1 20220706 - ELECTROSTATIC LENS FOR CONTROLLING BEAM OF ELECTRONS
Title (en)
ELECTROSTATIC LENS FOR CONTROLLING BEAM OF ELECTRONS
Title (de)
ELEKTROSTATISCHE LINSE ZUR STEUERUNG EINES ELEKTRONENSTRAHLS
Title (fr)
LENTILLE ÉLECTROSTATIQUE POUR COMMANDER UN FAISCEAU D'ÉLECTRONS
Publication
Application
Priority
- SE 1900143 A 20190830
- SE 1951077 A 20190924
- SE 2020050824 W 20200827
Abstract (en)
[origin: WO2021040609A1] An arrangement (100) is described which comprises an electrostatic lens (7) comprising an optical axis (6), a first electrostatic lens element (1), a second electrostatic lens element (2), and a deflector arrangement comprising a deflector package (5) with a plurality of electrodes (15) being arranged circumferentially around the optical axis (6) between the first end (26) of the first electrostatic lens element (1) and the second end (29) of the second electrostatic lens element (2), and arranged to deflect the beam of electrons, in at least a first coordinate direction (x, y) perpendicular to the optical axis (6). The deflector package (5) is arranged such that, during operation of the electrostatic lens (7), an electron, travelling from the first electrostatic lens (1) element to the second electrostatic lens element (2), first passes through the electric field between the first electrostatic lens element (1) and the deflector package (5), and subsequently passes through the electric field between the deflector package (5) and the second electrostatic lens element (2).
IPC 8 full level
H01J 49/44 (2006.01); G01N 23/227 (2018.01); H01J 37/05 (2006.01); H01J 49/00 (2006.01); H01J 49/28 (2006.01); H01J 49/46 (2006.01); H01J 49/48 (2006.01)
CPC (source: EP)
G01N 23/227 (2013.01); H01J 49/48 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2021040609 A1 20210304; CN 114303229 A 20220408; EP 4022669 A1 20220706; EP 4022669 A4 20231011
DOCDB simple family (application)
SE 2020050824 W 20200827; CN 202080060729 A 20200827; EP 20856886 A 20200827