EP 4031937 A1 20220727 - MULTI-FACETED MIRROR FOR ILLUMINATION OPTICS OF A PROJECTION PRINTING SYSTEM
Title (en)
MULTI-FACETED MIRROR FOR ILLUMINATION OPTICS OF A PROJECTION PRINTING SYSTEM
Title (de)
FACETTENSPIEGEL FÜR EINE BELEUCHTUNGSOPTIK EINER PROJEKTIONSBELICHTUNGSANLAGE
Title (fr)
MIROIR À FACETTES MULTIPLES POUR OPTIQUE D'ÉCLAIRAGE D'UN SYSTÈME D'IMPRESSION PAR PROJECTION
Publication
Application
Priority
- DE 102019214269 A 20190919
- EP 2020076137 W 20200918
Abstract (en)
[origin: WO2021053164A1] A multi-faceted mirror for the illumination optics of a projection printing system has a plurality of displaceable individual facets (8i) having a main facet body (35) and a reflection surface (36) provided thereon, wherein at least one subgroup of the individual facets (8i) has a displacement region, such that, in one or more displacement positions, the subgroup comes into contact with an abutment surface (38).
IPC 8 full level
G03F 7/20 (2006.01); G02B 26/08 (2006.01)
CPC (source: EP KR US)
G02B 26/0833 (2013.01 - EP KR); G03F 7/70075 (2013.01 - EP KR US); G03F 7/70116 (2013.01 - EP KR); G03F 7/702 (2013.01 - US); G03F 7/70983 (2013.01 - EP KR)
Citation (search report)
See references of WO 2021053164A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
WO 2021053164 A1 20210325; CN 114730136 A 20220708; DE 102019214269 A1 20210325; EP 4031937 A1 20220727; JP 2022548962 A 20221122; KR 20220066313 A 20220524; US 11789367 B2 20231017; US 2022206398 A1 20220630
DOCDB simple family (application)
EP 2020076137 W 20200918; CN 202080079949 A 20200918; DE 102019214269 A 20190919; EP 20775847 A 20200918; JP 2022517978 A 20200918; KR 20227012426 A 20200918; US 202217695402 A 20220315