EP 4042138 A4 20221109 - ADAPTER OF SAMPLE HOLDER FOR EVALUATION OF MECHANICAL DURABILITY OF THIN FILMS AND METHOD FOR EVALUATION OF QUALITY OF MECHANICAL DURABILITY OF THIN FILMS VIA THIS ADAPTER
Title (en)
ADAPTER OF SAMPLE HOLDER FOR EVALUATION OF MECHANICAL DURABILITY OF THIN FILMS AND METHOD FOR EVALUATION OF QUALITY OF MECHANICAL DURABILITY OF THIN FILMS VIA THIS ADAPTER
Title (de)
ADAPTER FÜR PROBENHALTER ZUR BEURTEILUNG DER MECHANISCHEN BESTÄNDIGKEIT VON DÜNNSCHICHTEN UND VERFAHREN ZUR QUALITÄTSBEURTEILUNG DER MECHANISCHEN BESTÄNDIGKEIT VON DÜNNSCHICHTEN ÜBER DIESEN ADAPTER
Title (fr)
ADAPTATEUR DE PORTE-ÉCHANTILLON POUR L'ÉVALUATION DE LA DURABILITÉ MÉCANIQUE DE FILMS MINCES ET PROCÉDÉ D'ÉVALUATION DE LA QUALITÉ DE DURABILITÉ MÉCANIQUE DE FILMS MINCES PAR L'INTERMÉDIAIRE DE CET ADAPTATEUR
Publication
Application
Priority
- CZ 2020405 A 20200710
- CZ 2020000039 W 20200824
Abstract (en)
[origin: WO2022007985A1] The invention is an adapter of sample holder for pursuance of method for evaluation of quality of mechanical durability of thin films which is formed by a hollow body (1), whose shell (101) is from below closed with a lid (8) which allows fixation of the adapter to a console of the holder of testing device and from above with a contact front face (2), on which is not only from the top fixed a tested sample (3) consisting of a substrate (31) and on it deposited thin film (32) but also there is from the bottom fixed a piezoelectric sensor (4) of acoustic emission which is equipped with a mechanical damper (5) and a preamplifier (6) of an electric signal which is through a connector (41) taken out from the body (1), where the essence of the invention is that the shell (101) and the contact front face (2) are designed as an assembly of two individual structural parts with different material composition, whereas the contact front face (2) is made of a transparent material which has mechanical stiffness and stability with the value of Young's modulus of elasticity higher than 40 GPa and at the place of its fixation there is an inner peripheral recess (103) in the shell (101), in which is placed LED illumination (7) which is connected through a coupler (71) with a source of electric energy which is placed outside of the body (1). Likewise, is the invention the method of evaluation of quality of mechanical durability of thin films deposited on transparent substrate with use of continuous monitoring and record of acoustic emission during low cycle repetitive scratch test with subcritical force by the help of the adapter.
IPC 8 full level
G01N 3/56 (2006.01); G01N 3/46 (2006.01); G01N 19/06 (2006.01); G01N 21/88 (2006.01); G01N 29/14 (2006.01)
CPC (source: CZ EP)
G01N 3/04 (2013.01 - EP); G01N 3/46 (2013.01 - CZ EP); G01N 3/56 (2013.01 - CZ EP); G01N 21/88 (2013.01 - CZ); G01N 29/11 (2013.01 - EP); G01N 29/14 (2013.01 - CZ EP); G01N 29/2437 (2013.01 - EP); G01N 2021/8816 (2013.01 - CZ); G01N 2203/0007 (2013.01 - EP); G01N 2203/0076 (2013.01 - EP); G01N 2203/0282 (2013.01 - EP); G01N 2203/0447 (2013.01 - EP); G01N 2291/015 (2013.01 - EP); G01N 2291/0237 (2013.01 - EP); G01N 2291/0258 (2013.01 - EP)
Citation (search report)
- [Y] CZ 305833 B6 20160330 - FYZIKÁLNÍ ÚSTAV AV ČR [CZ]
- [Y] WO 9222805 A1 19921223 - RENISHAW TRANSDUCER SYST [GB]
- [A] EP 3267177 A1 20180110 - ANTON PAAR TRITEC SA [CH]
- [A] US 2011239767 A1 20111006 - BELLIN FEDERICO [US]
- [A] RU 2147737 C1 20000420 - IJ UNI, et al
- [A] US 5587532 A 19961224 - ROSE DOUGLAS N [US]
- [A] WO 9610737 A1 19960411 - RENISHAW PLC [GB], et al
- See references of WO 2022007985A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2022007985 A1 20220113; CZ 2020405 A3 20210421; CZ 308746 B6 20210421; EP 4042138 A1 20220817; EP 4042138 A4 20221109
DOCDB simple family (application)
CZ 2020000039 W 20200824; CZ 2020405 A 20200710; EP 20944050 A 20200824