EP 4048978 A1 20220831 - DEVICE AND METHOD FOR MEASURING THE PROFILE OF FLAT OBJECTS COMPRISING UNKNOWN MATERIALS
Title (en)
DEVICE AND METHOD FOR MEASURING THE PROFILE OF FLAT OBJECTS COMPRISING UNKNOWN MATERIALS
Title (de)
VORRICHTUNG UND VERFAHREN ZUR PROFILMESSUNG VON FLACHEN OBJEKTEN MIT UNBEKANNTEN MATERIALIEN
Title (fr)
DISPOSITIF ET PROCÉDÉ POUR LA MESURE DU PROFIL D'OBJETS PLATS COMPRENANT DES MATÉRIAUX INCONNUS
Publication
Application
Priority
- EP 19205397 A 20191025
- EP 2020078927 W 20201014
Abstract (en)
[origin: WO2021078609A1] The invention relates to a method and a device (2) for measuring the profile of the surface (40) of a flat object (20) comprising unknown materials, comprising an interferometry measuring system (4), an ellipsometry measuring system (5), a beam splitter (82) for splitting a light beam of a light source (111) into an interferometry light beam (410) and an ellipsometry light beam (420), and an analysis unit which is designed to ascertain the profile height in the measured region on the object surface (40) from an analysis beam (490) analyzed in a detector unit (250) of the interferometry measuring system and a sensor beam (520) received in an ellipsometry sensor (220). The interferometry measuring system (4) comprises a beam divider (91), a reference mirror (60), and the detector unit (250), and the ellipsometry measuring system (5) comprises a polarizer (190) for polarizing an ellipsometry light beam (420) and transmitting same onto the measuring region on the object surface (40) as well as the ellipsometry sensor (220), which comprises a polarization filter in order to determine the polarization state of a received sensor beam.
IPC 8 full level
G01B 9/02 (2022.01); G01B 11/06 (2006.01); G01N 21/21 (2006.01)
CPC (source: CN EP US)
G01B 9/0207 (2013.01 - CN EP); G01B 11/0641 (2013.01 - CN EP US); G01N 21/21 (2013.01 - CN); G01N 21/211 (2013.01 - US)
Citation (search report)
See references of WO 2021078609A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 3812697 A1 20210428; CN 114616437 A 20220610; EP 4048978 A1 20220831; US 2022390355 A1 20221208; WO 2021078609 A1 20210429
DOCDB simple family (application)
EP 19205397 A 20191025; CN 202080075406 A 20201014; EP 2020078927 W 20201014; EP 20788826 A 20201014; US 202017769830 A 20201014