EP 4049299 A1 20220831 - ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR SAME
Title (en)
ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR SAME
Title (de)
ELEKTRONENQUELLE AUF DER BASIS VON FELDEMISSION UND DEREN HERSTELLUNGSVERFAHREN
Title (fr)
SOURCE D'ELECTRONS BASEE SUR L'EMISSION PAR EFFET DE CHAMP ET SON PROCEDE DE FABRICATION
Publication
Application
Priority
- FR 1912909 A 20191119
- FR 2020052087 W 20201116
Abstract (en)
[origin: WO2021099723A1] The invention relates to an electron source comprising a conductive substrate (11), a conductor arranged facing the substrate, the electron source emitting an electron beam when the conductor is positively biased with respect to the substrate, and an electrically insulating crystal (20) arranged on the substrate, facing the conductor, the substrate delimiting, with the crystal, an empty space (14) comprising at least one asperity (12) located at a distance from the crystal, the crystal having, in a plane parallel to the substrate, dimensions smaller than 100 nm and a thickness of less than 50 nm.
IPC 8 full level
H01J 37/073 (2006.01); H01J 1/304 (2006.01); H01J 9/02 (2006.01); H01J 29/48 (2006.01); H01J 37/065 (2006.01); H01J 37/28 (2006.01)
CPC (source: EP US)
H01J 1/304 (2013.01 - EP US); H01J 9/025 (2013.01 - EP US); H01J 29/481 (2013.01 - EP US); H01J 29/485 (2013.01 - EP US); H01J 37/065 (2013.01 - EP); H01J 37/073 (2013.01 - EP US); H01J 37/28 (2013.01 - EP); H01J 37/28 (2013.01 - US); H01J 2209/012 (2013.01 - US); H01J 2237/06341 (2013.01 - EP US); H01J 2237/262 (2013.01 - EP); H01J 2237/28 (2013.01 - EP); H01J 2237/2802 (2013.01 - EP); H01J 2329/0407 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3103311 A1 20210521; FR 3103311 B1 20211015; EP 4049299 A1 20220831; US 2023005695 A1 20230105; WO 2021099723 A1 20210527
DOCDB simple family (application)
FR 1912909 A 20191119; EP 20824299 A 20201116; FR 2020052087 W 20201116; US 202017756248 A 20201116