EP 4054812 A1 20220914 - METHOD FOR DETERMINING AT LEAST ONE PARAMETER FOR CUTTING A BLOCK OF SEMICONDUCTOR MATERIAL AND DEVICE IMPLEMENTING THE METHOD
Title (en)
METHOD FOR DETERMINING AT LEAST ONE PARAMETER FOR CUTTING A BLOCK OF SEMICONDUCTOR MATERIAL AND DEVICE IMPLEMENTING THE METHOD
Title (de)
VERFAHREN ZUR BESTIMMUNG MINDESTENS EINES PARAMETERS ZUM SCHNEIDEN EINES BLOCKS AUS HALBLEITERMATERIAL UND VORRICHTUNG ZUR DURCHFÜHRUNG DES VERFAHRENS
Title (fr)
PROCEDE DE DETERMINATION D'AU MOINS UN PARAMETRE DE COUPE D'UNE BRIQUE D'UN MATERIAU SEMI-CONDUCTEUR ET DISPOSITIF METTANT EN OEUVRE LE PROCEDE
Publication
Application
Priority
- FR 1912476 A 20191107
- EP 2020080753 W 20201103
Abstract (en)
[origin: WO2021089507A1] One aspect of the invention relates to a method (100) for determining at least of parameter for cutting C a block of semiconductor material, comprising: - a step (1E1) of determining the density and/or the size of the precipitates present in the block; - on the basis of at least one determining threshold, a step (1E2) of dividing the block into a plurality of zones, each zone being associated with a class chosen from at least two classes; - depending on the proportion of zones that are associated with each class, a step (1E3) of determining at least one cutting parameter.
IPC 8 full level
B26D 5/32 (2006.01); B28D 5/02 (2006.01); G01N 23/04 (2018.01)
CPC (source: EP)
B26D 5/32 (2013.01); B28D 5/045 (2013.01); G01N 21/3563 (2013.01); G01N 2021/8461 (2013.01); G01N 2021/8854 (2013.01); Y02P 70/10 (2015.11)
Citation (search report)
See references of WO 2021089507A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
FR 3102947 A1 20210514; EP 4054812 A1 20220914; WO 2021089507 A1 20210514
DOCDB simple family (application)
FR 1912476 A 20191107; EP 2020080753 W 20201103; EP 20797779 A 20201103