EP 4055208 B1 20231011 - POLISHING TANK WITH REMOVABLE LINING AND INTEGRATED SENSORS
Title (en)
POLISHING TANK WITH REMOVABLE LINING AND INTEGRATED SENSORS
Title (de)
POLIERGEFÄSS MIT ABNEHMBARER AUSKLEIDUNG UND INTEGRIERTEN SENSOREN
Title (fr)
CUVE DE POLISSAGE AVEC CHAUSSETTE AMOVIBLE ET CAPTEURS INTEGRES
Publication
Application
Priority
- EP 19208060 A 20191108
- EP 2020081177 W 20201105
Abstract (en)
[origin: WO2021089724A1] The present invention relates to a polishing tank (100) having a metal jacket (110) and a removable insert modular system (120) configured to be inserted into and to be removed from said jacket.
IPC 8 full level
C23F 3/06 (2006.01); B24B 1/00 (2006.01); B24B 31/06 (2006.01); C23F 3/00 (2006.01)
CPC (source: CN EP US)
B02C 17/04 (2013.01 - US); B02C 17/1805 (2013.01 - US); B02C 17/182 (2013.01 - US); B24B 29/00 (2013.01 - CN); B24B 31/003 (2013.01 - EP); B24B 41/00 (2013.01 - CN); B24B 49/00 (2013.01 - CN); B24B 49/14 (2013.01 - CN)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 3819400 A1 20210512; CN 114599481 A 20220607; EP 4055208 A1 20220914; EP 4055208 B1 20231011; JP 2022551236 A 20221208; JP 7446415 B2 20240308; US 2024149272 A1 20240509; WO 2021089724 A1 20210514
DOCDB simple family (application)
EP 19208060 A 20191108; CN 202080073304 A 20201105; EP 2020081177 W 20201105; EP 20800167 A 20201105; JP 2022519476 A 20201105; US 202017768376 A 20201105