EP 4058618 A1 20220921 - MACHINE FOR THE SURFACE PROCESSING OF PRODUCTS THROUGH PLASMA DEPOSITION OF THIN LAYERS OF COATING MATERIALS, AND METHOD FOR PROCESSING PRODUCTS THROUGH PLASMA
Title (en)
MACHINE FOR THE SURFACE PROCESSING OF PRODUCTS THROUGH PLASMA DEPOSITION OF THIN LAYERS OF COATING MATERIALS, AND METHOD FOR PROCESSING PRODUCTS THROUGH PLASMA
Title (de)
MASCHINE ZUR OBERFLÄCHENBEARBEITUNG VON PRODUKTEN DURCH PLASMAABSCHEIDUNG DÜNNER SCHICHTEN VON BESCHICHTUNGSMATERIALIEN UND VERFAHREN ZUR BEARBEITUNG VON PRODUKTEN DURCH PLASMA
Title (fr)
MACHINE POUR LE TRAITEMENT DE SURFACE DE PRODUITS AU MOYEN D'UN DÉPÔT PAR PLASMA DE COUCHES MINCES DE MATÉRIAUX DE REVÊTEMENT, ET PROCÉDÉ DE TRAITEMENT DE PRODUITS PAR PLASMA
Publication
Application
Priority
- IT 201900020931 A 20191112
- IB 2020060573 W 20201110
Abstract (en)
[origin: WO2021094919A1] Machine for the surface processing of products through plasma deposition of thin layers of coating materials, comprising an inductive high radio frequency plasma source, a dome, at least one inlet for a reactive gas entering said dome, at least one inlet for a mixture of precursor gas and carrier gas, a supply device for supplying said plasma source with said mixture of precursor gas and carrier gas, the machine comprising : - at least one first tank adapted to contain liquid for at least one precursor liquid, - a mass flow meter for measuring the mass flow rate of the precursor liquid exiting from said at least one first tank, - at least one second tank for a carrier gas, - a device for mixing and expanding the precursor liquid coming from said mass flow meter and said carrier gas coming from said at least one second tank, - a supply duct for supplying said expanded mixture from said mixing and expansion device to said at least one inlet for a mixture of precursor gas and carrier gas into said dome.
IPC 8 full level
C23C 16/40 (2006.01); C23C 16/509 (2006.01)
CPC (source: EP)
C03C 17/23 (2013.01); C04B 41/4531 (2013.01); C23C 16/401 (2013.01); C23C 16/403 (2013.01); C23C 16/4481 (2013.01); C23C 16/4486 (2013.01); C23C 16/4583 (2013.01); C23C 16/509 (2013.01); C23C 16/545 (2013.01); H01J 37/321 (2013.01); H01J 37/3244 (2013.01); H01J 37/32752 (2013.01); H01J 37/32899 (2013.01); C03C 2217/212 (2013.01); C03C 2217/213 (2013.01); C03C 2217/214 (2013.01); C03C 2218/153 (2013.01)
Citation (search report)
See references of WO 2021094919A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DOCDB simple family (application)
IB 2020060573 W 20201110; EP 20817491 A 20201110