EP 4063843 A1 20220928 - SPECTRUM ANALYSIS APPARATUS AND DATABASE CREATION METHOD
Title (en)
SPECTRUM ANALYSIS APPARATUS AND DATABASE CREATION METHOD
Title (de)
SPEKTRALANALYSEGERÄT UND VERFAHREN ZUR DATENBANKERSTELLUNG
Title (fr)
APPAREIL D'ANALYSE DE SPECTRE ET PROCÉDÉ DE CRÉATION DE BASE DE DONNÉES
Publication
Application
Priority
JP 2021048914 A 20210323
Abstract (en)
A plurality of records are registered in a database (34). Each record includes emission information and a peak energy sequence, such as used when carried out soft X-ray emission spectroscopy. A fitting unit (78) fits, for each peak energy sequence, a calculated spectrum which is based on the peak energy sequence with respect to an actual spectrum (74) which is acquired from a sample. An analyzer (80) analyzes the sample based on the emission information correlated to the calculated spectrum satisfying a fitting condition.
IPC 8 full level
G01N 23/2252 (2018.01)
CPC (source: EP US)
G01N 23/2252 (2013.01 - EP US); G01N 2223/079 (2013.01 - US)
Citation (applicant)
- JP 2017053639 A 20170316 - JEOL LTD
- JP H01141345 A 19890602 - CANON KK
Citation (search report)
- [I] NILSSON P O ET AL: "An ultrathin buried Si layer in GaAs studied by soft X-ray emission spectroscopy and surface X-ray diffraction: theory and experiment", JOURNAL OF ALLOYS AND COMPOUNDS, ELSEVIER SEQUOIA, LAUSANNE, CH, vol. 286, no. 1-2, 5 May 1999 (1999-05-05), pages 31 - 36, XP027393513, ISSN: 0925-8388, [retrieved on 19990505]
- [I] YOKOYAMA TAKAOMI ET AL: "Experimental Study of SXES: Determination of Iron Oxidation State in Silicate Minerals", MICROSCOPY AND MICROANALYSIS, vol. 26, no. S2, 30 July 2020 (2020-07-30), pages 1018 - 1021, XP055947218, ISSN: 1431-9276, Retrieved from the Internet <URL:https://www.cambridge.org/core/services/aop-cambridge-core/content/view/1769BFD44F80084025108122347965DF/S1431927620016682a.pdf/experimental-study-of-sxes-determination-of-iron-oxidation-state-in-silicate-minerals.pdf> DOI: 10.1017/S1431927620016682
- [I] GUO JINGHUA ET AL: "In situ and ex situ characterization of thin films by soft X-ray emission spectroscopy", JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, vol. 110, 28 September 2000 (2000-09-28), pages 41 - 67, XP055947152
- [A] MCALISTER A J ET AL: "Soft x-ray emission spectra of metallic solids : critical review of selected systems and annotated spectral index", 1 January 1974 (1974-01-01), pages 1 - 186, XP061046992, Retrieved from the Internet <URL:https://nvlpubs.nist.gov/nistpubs/Legacy/SP/nbsspecialpublication369.pdf> [retrieved on 19740101], DOI: 10.6028/NBS.SP.369
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
EP 4063843 A1 20220928; JP 2022147602 A 20221006; JP 7307761 B2 20230712; US 2022307996 A1 20220929
DOCDB simple family (application)
EP 22162214 A 20220315; JP 2021048914 A 20210323; US 202217697236 A 20220317