EP 4073287 A1 20221019 - APPARATUS FOR ELECTROLESS METALLIZATION OF A TARGET SURFACE OF AT LEAST ONE WORKPIECE, AND METHOD AND DIFFUSER PLATE FOR THE PURPOSE
Title (en)
APPARATUS FOR ELECTROLESS METALLIZATION OF A TARGET SURFACE OF AT LEAST ONE WORKPIECE, AND METHOD AND DIFFUSER PLATE FOR THE PURPOSE
Title (de)
VORRICHTUNG ZUM STROMLOSEN METALLISIEREN EINER ZIELOBERFLÄCHE WENIGSTENS EINES WERKSTÜCKS SOWIE VERFAHREN UND DIFFUSORPLATTE HIERZU
Title (fr)
APPAREIL DE MÉTALLISATION AUTOCATALYTIQUE D'UNE SURFACE CIBLE D'AU MOINS UNE PIÈCE, PROCÉDÉ ET PLAQUE DE DIFFUSION À CET EFFET
Publication
Application
Priority
- DE 102019134116 A 20191212
- EP 2020082594 W 20201118
Abstract (en)
[origin: WO2021115746A1] The present invention relates to an apparatus (1) for electroless metallization of a target surface of at least one workpiece (5), having a vessel (10) to accommodate a metallizing solution having an inlet (15) and an outlet (16) for the metallizing solution, and a holder (20) which is for accommodating the at least one workpiece (5) and can be arranged within the vessel (10), wherein at least one diffuser plate (30) is provided between the at least one inlet (15) and the holder (20) and has a multitude of diffuser openings (35) spaced apart in the plane of a plate (E), and wherein a movement device (40) is provided, which can move the diffuser plate (30) in at least one spatial direction in the vessel (10). The present invention further relates to a process for electroless metallization of the target surface of the at least one workpiece (5).
IPC 8 full level
C23C 18/16 (2006.01)
CPC (source: EP US)
C23C 18/1628 (2013.01 - EP US); C23C 18/163 (2013.01 - US); C23C 18/1669 (2013.01 - EP US); C23C 18/31 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019134116 A1 20210617; CN 114829673 A 20220729; CN 114829673 B 20240802; EP 4073287 A1 20221019; US 2023047104 A1 20230216; WO 2021115746 A1 20210617
DOCDB simple family (application)
DE 102019134116 A 20191212; CN 202080086633 A 20201118; EP 2020082594 W 20201118; EP 20810922 A 20201118; US 202017783850 A 20201118