EP 4073588 A1 20221019 - OPTICAL SYSTEM, HEATING ARRANGEMENT, AND METHOD FOR HEATING AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM
Title (en)
OPTICAL SYSTEM, HEATING ARRANGEMENT, AND METHOD FOR HEATING AN OPTICAL ELEMENT IN AN OPTICAL SYSTEM
Title (de)
OPTISCHES SYSTEM, SOWIE HEIZANORDNUNG UND VERFAHREN ZUM HEIZEN EINES OPTISCHEN ELEMENTS IN EINEM OPTISCHEN SYSTEM
Title (fr)
SYSTÈME OPTIQUE, SYSTÈME DE CHAUFFAGE ET PROCÉDÉ DE CHAUFFAGE D'UN ÉLÉMENT OPTIQUE DANS UN SYSTÈME OPTIQUE
Publication
Application
Priority
- DE 102019219289 A 20191211
- EP 2020073207 W 20200819
Abstract (en)
[origin: WO2021115641A1] The invention relates to an optical system, to a heating arrangement and to a method for heating an optical element in an optical system. An optical system, in particular in a microlithographic projection exposure system, comprises: at least one optical element which comprises an optical active surface and is designed for a working wavelength of less than 30 nm; a heating arrangement which is intended for heating this optical element and has a plurality of IR radiators (101, 102, 103, 104, 401, 402, 403, 404) for subjecting the optical active surface to IR radiation, wherein the IR radiator can be switched on and off in order to variably adjust different heating profiles in the optical element independently of one another; and at least one beam shaping unit (130, 231, 232, 233, 234, 430) for shaping the IR radiation directed onto the optical active surface by the IR radiators.
IPC 8 full level
G02B 7/00 (2021.01); G02B 7/18 (2021.01); G03F 7/20 (2006.01)
CPC (source: EP KR US)
G02B 6/102 (2013.01 - US); G02B 6/262 (2013.01 - US); G02B 7/181 (2013.01 - EP KR); G02B 7/1815 (2013.01 - US); G02B 17/0832 (2013.01 - US); G03F 7/70891 (2013.01 - EP KR US); H05B 3/84 (2013.01 - US); G02B 23/02 (2013.01 - US); G02B 27/0944 (2013.01 - US); G02B 27/095 (2013.01 - US); H05B 2203/032 (2013.01 - US)
Citation (search report)
See references of WO 2021115641A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
DOCDB simple family (publication)
DE 102019219289 A1 20210617; EP 4073588 A1 20221019; KR 20220113459 A 20220812; US 2022299732 A1 20220922; WO 2021115641 A1 20210617
DOCDB simple family (application)
DE 102019219289 A 20191211; EP 2020073207 W 20200819; EP 20767478 A 20200819; KR 20227023217 A 20200819; US 202217805757 A 20220607