EP 4079443 A1 20221026 - METHOD FOR CONTROLLING AN ENERGY DISTRIBUTION AND SUBSTRATE INTRODUCED WITHIN A SUBSTRATE BY MEANS OF A LINE FOCUS OF A LASER BEAM
Title (en)
METHOD FOR CONTROLLING AN ENERGY DISTRIBUTION AND SUBSTRATE INTRODUCED WITHIN A SUBSTRATE BY MEANS OF A LINE FOCUS OF A LASER BEAM
Title (de)
VERFAHREN ZUM KONTROLLIEREN EINER MITTELS EINES LINIENFOKUS EINES LASERSTRAHLS INNERHALB EINES SUBSTRATS EINGEBRACHTEN ENERGIEVERTEILUNG UND SUBSTRAT
Title (fr)
PROCÉDÉ DE VÉRIFICATION D'UNE DISTRIBUTION D'ÉNERGIE APPLIQUÉE AU MOYEN D'UN FOYER LINÉAIRE D'UN FAISCEAU LASER À L'INTÉRIEURE D'UN SUBSTRAT ET SUBSTRAT
Publication
Application
Priority
EP 21170243 A 20210423
Abstract (de)
Die vorliegende Erfindung betrifft ein Verfahren zum Kontrollieren einer mittels zumindest eines Linienfokus zumindest eines Laserstrahls innerhalb eines Substrats eingebrachten Energieverteilung und ein Substrat.
IPC 8 full level
B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/066 (2014.01); B23K 26/073 (2006.01); B23K 26/53 (2014.01); B23K 103/00 (2006.01)
CPC (source: EP)
B23K 26/0006 (2013.01); B23K 26/0624 (2015.10); B23K 26/0626 (2013.01); B23K 26/066 (2015.10); B23K 26/0738 (2013.01); B23K 26/53 (2015.10); B23K 2103/54 (2018.08); B23K 2103/56 (2018.08)
Citation (applicant)
FROEHLY, L.COURVOISIER, F.MATHIS, A.JACQUOT, M.FURFARO, L.GIUST, R.DUDLEY, J. M.: "Arbitrary accelerating micron-scale caustic beams in two and three dimensions", OPTICS EXPRESS, vol. 19, no. 17, 2011, pages 16455 - 16465
Citation (search report)
- [XI] US 10010971 B1 20180703 - HOSSEINI S ABBAS [US]
- [X] US 10882143 B2 20210105 - KUMKAR MALTE [DE], et al
- [X] US 10661384 B2 20200526 - KUMKAR MALTE [DE], et al
- [X] US 2020254567 A1 20200813 - GENIER MICHAEL LUCIEN [US]
- [X] US 2020361037 A1 20201119 - IVANOV VIACHESLAV VIACHESLAVOVICH [RU], et al
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DOCDB simple family (application)
EP 21170243 A 20210423