Title (en)

POLISHING COMPOSITION, AND METHOD OF POLISHING SILICON WAFER

Title (de)

POLIERZUSAMMENSETZUNG UND VERFAHREN ZUM POLIEREN EINES SILIZIUMWAFERS

Title (fr)

COMPOSITION DE POLISSAGE ET PROCÉDÉ DE POLISSAGE D'UNE TRANCHE DE SILICIUM

Publication

EP 4083153 B1 20231018 (EN)

Application

EP 20907166 A 20201112

Priority

• JP 2019238064 A 20191227
• JP 2020042328 W 20201112

Abstract (en)

[origin: EP4083153A1] A polishing composition is provided that can reduce minute defects and haze on the semiconductor wafer after polishing and is highly capable of hydophilizing the semiconductor wafer. A polishing composition includes: an abrasive; a basic compound; and a water-soluble polymer, the water-soluble polymer being a copolymer with a vinyl alcohol-based resin having a 1,2-diol structural unit represented by the following general formula, (A), polymerized with vinylpyrrolidone:Here, each of R¹, R² and R³ independently indicates a hydrogen atom or an organic group, X indicates a single bond or a bonding chain, and each of R⁴, R⁵ and R⁶ independently indicates a hydrogen atom or an organic group.

IPC 8 full level

C09G 1/02 (2006.01); B24B 37/00 (2012.01); C09K 3/14 (2006.01); H01L 21/02 (2006.01); H01L 21/304 (2006.01)

CPC (source: EP KR)

B24B 37/044 (2013.01 - KR); C09G 1/02 (2013.01 - EP KR); H01L 21/02024 (2013.01 - EP); H01L 21/30625 (2013.01 - KR)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DOCDB simple family (publication)

EP 4083153 A1 20221102; EP 4083153 A4 20230419; EP 4083153 B1 20231018; CN 114846110 A 20220802; CN 114846110 B 20240528; JP 2021105145 A 20210726; KR 20220120567 A 20220830; TW 202134363 A 20210916; WO 2021131383 A1 20210701

DOCDB simple family (application)

EP 20907166 A 20201112; CN 202080089558 A 20201112; JP 2019238064 A 20191227; JP 2020042328 W 20201112; KR 20227020706 A 20201112; TW 109146015 A 20201224