EP 4091023 A1 20221123 - PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
Title (en)
PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
Title (de)
PELLIKELMEMBRAN FÜR EINE LITHOGRAPHISCHE VORRICHTUNG
Title (fr)
MEMBRANE DE PELLICULE POUR APPAREIL LITHOGRAPHIQUE
Publication
Application
Priority
- EP 20152141 A 20200116
- EP 20179484 A 20200611
- EP 20193717 A 20200831
- EP 2020086067 W 20201215
Abstract (en)
[origin: WO2021144097A1] A pellicle membrane for a lithographic apparatus, said membrane comprising a matrix including a plurality of inclusions distributed therein is provided. Also provided is a method of manufacturing said pellicle membrane, a lithographic apparatus comprising said pellicle membrane, a pellicle assembly for use in a lithographic apparatus comprising said membrane, as well as the use of the pellicle membrane in a lithographic apparatus or method.
IPC 8 full level
CPC (source: EP IL KR US)
G03F 1/62 (2013.01 - EP IL KR US); G03F 7/70191 (2013.01 - EP IL KR); G03F 7/70308 (2013.01 - EP IL KR); G03F 7/705 (2013.01 - US); G03F 7/70983 (2013.01 - EP IL KR US)
Citation (search report)
See references of WO 2021144097A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2021144097 A1 20210722; CA 3163932 A1 20210722; CN 114930246 A 20220819; EP 4091023 A1 20221123; IL 293938 A 20220801; JP 2023509859 A 20230310; KR 20220126728 A 20220916; NL 2027098 A 20210831; NL 2027098 B1 20211014; TW 202136902 A 20211001; US 2023050613 A1 20230216
DOCDB simple family (application)
EP 2020086067 W 20201215; CA 3163932 A 20201215; CN 202080092236 A 20201215; EP 20821256 A 20201215; IL 29393822 A 20220614; JP 2022538364 A 20201215; KR 20227024353 A 20201215; NL 2027098 A 20201214; TW 110100562 A 20210107; US 202017792464 A 20201215