EP 4091340 A1 20221123 - MEMS TRANSDUCER WITH INCREASED PERFORMANCE
Title (en)
MEMS TRANSDUCER WITH INCREASED PERFORMANCE
Title (de)
MEMS-WANDLER MIT ERHÖHTER LEISTUNGSFÄHIGKEIT
Title (fr)
TRANSDUCTEUR MEMS À PERFORMANCE ACCRUE
Publication
Application
Priority
- EP 20152560 A 20200117
- EP 20168836 A 20200408
- EP 2021050766 W 20210115
Abstract (en)
[origin: WO2021144400A1] The invention relates to an MEMS transducer that comprises a vibrating diaphragm (1) for producing or picking up pressure waves in a fluid in a vertical direction, wherein the vibrating diaphragm (1) is held by a support (4) and the vibrating diaphragm (1) has two or more vertical sections (2) that are formed parallel to the vertical direction and comprise at least one layer of an actuator material (11). The ends of the vibrating diaphragm (1) are in contact with an electrode (13), which means that actuation of the at least one electrode (13) allows the two or more vertical sections (2) to be excited to produce horizontal vibrations or which means that excitation of the two or more vertical sections (2) to produce horizontal vibrations results in an electrical signal being able to be generated at the at least one electrode (13).
IPC 8 full level
H04R 17/00 (2006.01); H04R 7/14 (2006.01)
CPC (source: EP KR US)
H04R 7/125 (2013.01 - US); H04R 7/14 (2013.01 - EP KR); H04R 17/005 (2013.01 - EP KR US); H04R 17/10 (2013.01 - KR US); H04R 31/003 (2013.01 - US); H04R 2201/003 (2013.01 - EP KR US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
EP 3852391 A1 20210721; EP 3852391 B1 20240508; CN 115280797 A 20221101; EP 4091340 A1 20221123; JP 2023511538 A 20230320; KR 20220130720 A 20220927; US 11800294 B2 20231024; US 2023047856 A1 20230216; WO 2021144400 A1 20210722
DOCDB simple family (application)
EP 20168836 A 20200408; CN 202180016496 A 20210115; EP 2021050766 W 20210115; EP 21700309 A 20210115; JP 2022542931 A 20210115; KR 20227027423 A 20210115; US 202117758923 A 20210115