EP 4104021 A2 20221221 - OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND METHOD
Title (en)
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND METHOD
Title (de)
OPTISCHE BAUGRUPPE, PROJEKTIONSBELICHTUNGSANLAGE UND VERFAHREN
Title (fr)
MODULE OPTIQUE, INSTALLATION D'ÉCLAIRAGE PAR PROJECTION ET PROCÉDÉ
Publication
Application
Priority
- DE 102020201774 A 20200213
- EP 2021053278 W 20210211
Abstract (en)
[origin: WO2021160712A2] The invention relates to an optical assembly (30) of a projection exposure apparatus for semiconductor lithography, comprising an optical element (31) and an actuator (33) for deforming the optical element (31), wherein a bias is applied to the actuator (33) by a controller present. Furthermore, the invention relates to a projection exposure apparatus (1) for semiconductor lithography, comprising an optical assembly (30) according to any one of the preceding claims, and a method for operating an actuator (33) for deforming an optical element (31) for semiconductor lithography, wherein a bias is applied to the actuator (33) by a controller present.
IPC 8 full level
G03F 7/20 (2006.01); G02B 7/185 (2021.01); G02B 26/00 (2006.01); H10N 30/00 (2023.01); H10N 30/20 (2023.01); H10N 30/50 (2023.01); H10N 30/88 (2023.01)
CPC (source: EP US)
G02B 7/181 (2013.01 - EP US); G02B 7/182 (2013.01 - US); G02B 7/185 (2013.01 - EP); G02B 26/0825 (2013.01 - EP US); G03F 7/70266 (2013.01 - EP US); G03F 7/70891 (2013.01 - EP); H10N 30/206 (2023.02 - US); H10N 30/50 (2023.02 - EP US); H10N 30/80 (2023.02 - EP); H10N 30/852 (2023.02 - EP); H10N 30/88 (2023.02 - US); G02B 5/0891 (2013.01 - EP); G02B 5/09 (2013.01 - EP)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102020201774 A1 20210819; CN 115698859 A 20230203; EP 4104021 A2 20221221; US 2022382165 A1 20221201; WO 2021160712 A2 20210819; WO 2021160712 A3 20211014
DOCDB simple family (application)
DE 102020201774 A 20200213; CN 202180020492 A 20210211; EP 2021053278 W 20210211; EP 21705156 A 20210211; US 202217818904 A 20220810