Global Patent Index - EP 4110968 A1

EP 4110968 A1 20230104 - ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS

Title (en)

ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS

Title (de)

ORGANOAMINOFUNKTIONALISIERTE CYCLISCHE OLIGOSILOXANE ZUR ABSCHEIDUNG VON SILICIUMHALTIGEN FILMEN

Title (fr)

OLIGOSILOXANES CYCLIQUES À FONCTION ORGANOAMINO POUR LE DÉPÔT DE FILMS CONTENANT DU SILICIUM

Publication

EP 4110968 A1 20230104 (EN)

Application

EP 20928695 A 20200925

Priority

  • US 202016838997 A 20200402
  • US 202017030187 A 20200923
  • US 2020052635 W 20200925

Abstract (en)

[origin: WO2021201910A1] Amino-functionalized cyclic oligosiloxanes, which have at least three silicon and three oxygen atoms as well as at least one organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized cyclic oligosiloxanes are also disclosed.

IPC 8 full level

C23C 16/40 (2006.01); C07F 7/21 (2006.01); C23C 16/455 (2006.01)

CPC (source: EP KR)

C07F 7/21 (2013.01 - EP KR); C23C 16/401 (2013.01 - EP KR); C23C 16/45553 (2013.01 - EP KR)

Designated contracting state (EPC)

AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

Designated extension state (EPC)

BA ME

Designated validation state (EPC)

KH MA MD TN

DOCDB simple family (publication)

WO 2021201910 A1 20211007; CN 115443347 A 20221206; EP 4110968 A1 20230104; EP 4110968 A4 20230913; JP 2023520226 A 20230516; KR 20220163999 A 20221212

DOCDB simple family (application)

US 2020052635 W 20200925; CN 202080100242 A 20200925; EP 20928695 A 20200925; JP 2022560058 A 20200925; KR 20227037953 A 20200925