EP 4110968 A4 20230913 - ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
Title (en)
ORGANOAMINO-FUNCTIONALIZED CYCLIC OLIGOSILOXANES FOR DEPOSITION OF SILICON-CONTAINING FILMS
Title (de)
ORGANOAMINOFUNKTIONALISIERTE CYCLISCHE OLIGOSILOXANE ZUR ABSCHEIDUNG VON SILICIUMHALTIGEN FILMEN
Title (fr)
OLIGOSILOXANES CYCLIQUES À FONCTION ORGANOAMINO POUR LE DÉPÔT DE FILMS CONTENANT DU SILICIUM
Publication
Application
Priority
- US 202016838997 A 20200402
- US 202017030187 A 20200923
- US 2020052635 W 20200925
Abstract (en)
[origin: WO2021201910A1] Amino-functionalized cyclic oligosiloxanes, which have at least three silicon and three oxygen atoms as well as at least one organoamino group and methods for making the oligosiloxanes are disclosed. Methods for depositing silicon and oxygen containing films using the organoamino-functionalized cyclic oligosiloxanes are also disclosed.
IPC 8 full level
C23C 16/40 (2006.01); C07F 7/21 (2006.01); C23C 16/455 (2006.01)
CPC (source: EP KR)
C07F 7/21 (2013.01 - EP KR); C23C 16/401 (2013.01 - EP KR); C23C 16/45553 (2013.01 - EP KR)
Citation (search report)
[L] WO 2020206295 A1 20201008 - VERSUM MAT US LLC [US]
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
WO 2021201910 A1 20211007; CN 115443347 A 20221206; EP 4110968 A1 20230104; EP 4110968 A4 20230913; JP 2023520226 A 20230516; KR 20220163999 A 20221212
DOCDB simple family (application)
US 2020052635 W 20200925; CN 202080100242 A 20200925; EP 20928695 A 20200925; JP 2022560058 A 20200925; KR 20227037953 A 20200925