EP 4122006 A1 20230125 - METHOD FOR TREATING SUBSTRATES WITH CHEMICALS
Title (en)
METHOD FOR TREATING SUBSTRATES WITH CHEMICALS
Title (de)
VERFAHREN ZUM BEHANDELN VON SUBSTRATEN MIT CHEMIKALIEN
Title (fr)
PROCÉDÉ DE TRAITEMENT DE SUBSTRATS AVEC PRODUITS CHIMIQUES
Publication
Application
Priority
- AT 212020 U 20200220
- EP 2021053867 W 20210217
Abstract (en)
[origin: WO2021165308A1] According to the invention, when treating substrates with a treatment medium containing at least one chemical effective for treatment, for example when removing a masking layer (101) from a semiconductor substrate (110) by etching, the treatment medium is heated to a temperature effective for treatment only immediately prior to apply to the substrate (110), the treatment medium being at the optimum temperature for treatment when it impinges on the substrate. Thus, a short treatment time, low, thermally induced decomposition losses of chemical and a saving of treatment medium are achieved.
IPC 8 full level
H01L 21/67 (2006.01); H04K 1/00 (2006.01); H04K 1/08 (2006.01)
CPC (source: AT EP)
G03F 7/42 (2013.01 - AT); H01L 21/32134 (2013.01 - EP); H01L 21/47573 (2013.01 - AT); H01L 21/67023 (2013.01 - AT); H01L 21/67063 (2013.01 - AT); H01L 21/67075 (2013.01 - AT); H01L 21/67086 (2013.01 - AT); H01L 21/6715 (2013.01 - AT); H04K 1/00 (2013.01 - AT EP); H04L 63/18 (2013.01 - AT); H01L 21/02019 (2013.01 - AT); H01L 21/306 (2013.01 - AT); H01L 21/30604 (2013.01 - AT); H01L 21/311 (2013.01 - AT); H01L 21/31105 (2013.01 - AT); H01L 21/31144 (2013.01 - EP); H01L 21/32133 (2013.01 - AT); H01L 21/67248 (2013.01 - AT); H01L 21/67253 (2013.01 - AT); H04K 1/003 (2013.01 - EP); H04K 1/006 (2013.01 - EP); H04K 1/08 (2013.01 - EP); H04L 1/0023 (2013.01 - AT)
Citation (search report)
See references of WO 2021165308A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2021165308 A1 20210826; AT 16977 U2 20210115; AT 16977 U3 20210315; EP 4122006 A1 20230125; JP 2023519493 A 20230511
DOCDB simple family (application)
EP 2021053867 W 20210217; AT 212020 U 20200220; EP 21707631 A 20210217; JP 2022549907 A 20210217