EP 4128309 A1 20230208 - FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE
Title (en)
FLOOD COLUMN, CHARGED PARTICLE TOOL AND METHOD FOR CHARGED PARTICLE FLOODING OF A SAMPLE
Title (de)
FLUTSÄULE, WERKZEUG FÜR GELADENE TEILCHEN UND VERFAHREN ZUM FLUTEN EINER PROBE MIT GELADENEN TEILCHEN
Title (fr)
COLONNE D'INJECTION, OUTIL À PARTICULES CHARGÉES ET PROCÉDÉ D'INJECTION DE PARTICULES CHARGÉES D'UN ÉCHANTILLON
Publication
Application
Priority
- EP 20165312 A 20200324
- EP 21159851 A 20210301
- EP 2021056521 W 20210315
Abstract (en)
[origin: WO2021190977A1] A charged particle apparatus for projecting a charged particle multi- beam to a sample, the apparatus comprising a primary column configured to generate a primary beam towards a sample, and a flood column for charged particle flooding of the sample. The flood column comprises a charged particle source (301) configured to emit a charged particle beam along a beam path; a source lens (310) arranged down-beam of the charged particle source; a condenser lens (320) arranged down-beam of the source lens; and an aperture body (350) arranged down-beam of the condenser lens, wherein the aperture body is for passing a portion of the charged particle beam; and wherein the source lens is controllable so as to variably set the beam angle of the charged particle beam down-beam of the source lens.
IPC 8 full level
H01J 37/02 (2006.01); H01J 37/28 (2006.01)
CPC (source: EP IL KR US)
H01J 37/026 (2013.01 - EP IL KR); H01J 37/063 (2013.01 - US); H01J 37/12 (2013.01 - US); H01J 37/28 (2013.01 - EP IL KR); H01J 37/3177 (2013.01 - US); H01J 2237/0044 (2013.01 - EP IL KR); H01J 2237/0048 (2013.01 - EP IL KR); H01J 2237/061 (2013.01 - EP IL KR); H01J 2237/2817 (2013.01 - EP IL KR)
Citation (search report)
See references of WO 2021190977A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
WO 2021190977 A1 20210930; CN 115335949 A 20221111; EP 4128309 A1 20230208; IL 296088 A 20221101; KR 20220143942 A 20221025; TW 202141558 A 20211101; US 2023017894 A1 20230119
DOCDB simple family (application)
EP 2021056521 W 20210315; CN 202180024634 A 20210315; EP 21711562 A 20210315; IL 29608822 A 20220831; KR 20227033291 A 20210315; TW 110109926 A 20210319; US 202217952129 A 20220923