EP 4128324 A1 20230208 - REMOVABLE STRUCTURE USED FOR THE TRANSFER OR MANIPULATION OF LAYERS, AND METHOD FOR TRANSFER OF A LAYER USING SAID REMOVABLE STRUCTURE
Title (en)
REMOVABLE STRUCTURE USED FOR THE TRANSFER OR MANIPULATION OF LAYERS, AND METHOD FOR TRANSFER OF A LAYER USING SAID REMOVABLE STRUCTURE
Title (de)
ENTFERNBARE STRUKTUR ZUR ÜBERTRAGUNG ODER MANIPULATION VON SCHICHTEN UND VERFAHREN ZUR ÜBERTRAGUNG EINER SCHICHT MIT DIESER ABNEHMBAREN STRUKTUR
Title (fr)
STRUCTURE DEMONTABLE UTILISEE POUR LE TRANSFERT OU LA MANIPULATION DE COUCHES, ET PROCEDE DE TRANSFERT D'UNE COUCHE METTANT EN ?UVRE LADITE STRUCTURE DEMONTABLE
Publication
Application
Priority
- FR 2003263 A 20200401
- FR 2021050435 W 20210316
Abstract (en)
[origin: WO2021198576A1] The invention relates to a removable structure (100) comprising: - at least two interfaces, an assembly interface (30) and a privileged detachment interface (1), - a receiver substrate (20), - a donor substrate (10) comprising a useful layer (3) to be transferred that is disposed on an initial substrate (2), the privileged detachment interface (1) being located between said useful layer (3) and the initial substrate (2), and the assembly interface (30) being located between said useful layer (3) and the receiver substrate (20). The removable structure (100) is characterised in that the assembly interface (30) has an assembly interruption zone (31) comprising at least one cavity (31a) present in the receiver substrate (20) or in the useful layer (3), the assembly interruption zone (31) being located in a peripheral region of the removable structure (100).
IPC 8 full level
H01L 21/02 (2006.01); H01L 21/18 (2006.01); H01L 21/78 (2006.01)
CPC (source: EP KR US)
H01L 21/02002 (2013.01 - EP KR US); H01L 21/187 (2013.01 - EP KR US); H01L 21/304 (2013.01 - US); H01L 21/7806 (2013.01 - EP KR US)
Citation (search report)
See references of WO 2021198576A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
FR 3109016 A1 20211008; FR 3109016 B1 20231201; CN 115398597 A 20221125; EP 4128324 A1 20230208; KR 20220161343 A 20221206; TW 202147488 A 20211216; US 2023154755 A1 20230518; WO 2021198576 A1 20211007
DOCDB simple family (application)
FR 2003263 A 20200401; CN 202180025499 A 20210316; EP 21719192 A 20210316; FR 2021050435 W 20210316; KR 20227034661 A 20210316; TW 110110066 A 20210319; US 202117995547 A 20210316