EP 4133260 A1 20230215 - METHOD AND INSPECTION DEVICE FOR OPTICALLY INSPECTING A SURFACE
Title (en)
METHOD AND INSPECTION DEVICE FOR OPTICALLY INSPECTING A SURFACE
Title (de)
VERFAHREN UND INSPEKTIONSEINRICHTUNG ZUR OPTISCHEN INSPEKTION EINER OBERFLÄCHE
Title (fr)
PROCÉDÉ ET DISPOSITIF D'INSPECTION POUR L'INSPECTION OPTIQUE D'UNE SURFACE
Publication
Application
Priority
- DE 102020109945 A 20200409
- EP 2021057217 W 20210322
Abstract (en)
[origin: CA3179520A1] The invention relates to a method for optically inspecting a surface (10) of an object (1) and to an inspection device (9). In the method, a pattern (13), which is chronologically periodic during an image-capturing sequence and has different illumination patterns (130), is generated on the surface (10) by means of an illumination device (8) of the inspection device (9) and, in the image-capturing sequence, multiple images of the pattern (13) on the surface (10) are captured by means of an image-capturing device (7) of the inspection device (9), the generation of one of the different illumination patterns (130) being synchronised in each case with the capture of one of the images of the pattern (13); the phase pattern (13) is determined from the sequence of known illumination patterns (130) captured in at least one pixel; and defects (4, 5) on the surface (10) are identified from deviations of the illumination pattern (130) captured from the known illumination pattern (130) generated. The illumination device (8) and the image-capturing device (7) are arranged at the reflection angle (a), wherein the object (1) is moved relative to the inspection device (9), and the duration of the image-capturing sequence is selected such that a sequence reflection region (17) can be considered constant (figure 4b).
IPC 8 full level
G01N 21/88 (2006.01); G01B 11/25 (2006.01)
CPC (source: EP IL KR US)
G01B 11/2513 (2013.01 - US); G01B 11/2518 (2013.01 - US); G01B 11/2522 (2013.01 - EP IL KR); G01B 11/2527 (2013.01 - EP IL KR); G01N 21/8806 (2013.01 - EP IL KR US); G01N 21/8851 (2013.01 - EP IL KR); G01N 21/89 (2013.01 - IL KR); G01N 21/89 (2013.01 - EP); G01N 2021/8909 (2013.01 - EP IL KR)
Citation (search report)
See references of WO 2021204521A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
DE 102020109945 A1 20211014; BR 112022020214 A2 20221213; CA 3179520 A1 20211014; CN 115398213 A 20221125; EP 4133260 A1 20230215; IL 297164 A 20221201; JP 2023521175 A 20230523; KR 20230014686 A 20230130; MX 2022012556 A 20230111; US 2023140278 A1 20230504; WO 2021204521 A1 20211014
DOCDB simple family (application)
DE 102020109945 A 20200409; BR 112022020214 A 20210322; CA 3179520 A 20210322; CN 202180026475 A 20210322; EP 2021057217 W 20210322; EP 21715496 A 20210322; IL 29716422 A 20221006; JP 2022562049 A 20210322; KR 20227038758 A 20210322; MX 2022012556 A 20210322; US 202117917812 A 20210322