EP 4143143 A1 20230308 - MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL
Title (en)
MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED OXIDE DIELECTRIC UNDERLAYER AND METHOD FOR DEPOSITING THIS MATERIAL
Title (de)
MATERIAL MIT EINEM STAPEL MIT EINER DÜNNEN DIELEKTRISCHEN UNTERSCHICHT AUS ZINKBASIERTEM OXID UND VERFAHREN ZUR ABLAGERUNG DIESES MATERIALS
Title (fr)
MATÉRIAU COMPORTANT UN EMPILEMENT A SOUS-COUCHE DIELECTRIQUE FINE D'OXIDE A BASE DE ZINC ET PROCÉDÉ DE DEPÔT DE CE MATERIAU
Publication
Application
Priority
- FR 2004310 A 20200430
- FR 2021050738 W 20210428
Abstract (en)
[origin: WO2021219961A1] The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metallic functional layer (140) and comprising: - an underlayer of zinc-based oxide, ZnO (129), of between 0.3 and 4.4 nm; - a dielectric underlayer of titanium-based oxide, TiOx (127), which is located under and in contact with said underlayer of zinc-based oxide, ZnO (129), with a physical thickness of the dielectric underlayer of titanium-based oxide TiOx (127) of between 5.0 and 50.0 nm; - an overlayer of zinc-based oxide, ZnO (161), of between 2.0 and 10.0 nm: - a dielectric overlayer (165).
IPC 8 full level
C03C 17/36 (2006.01)
CPC (source: EP)
C03C 17/36 (2013.01); C03C 17/361 (2013.01); C03C 17/3618 (2013.01); C03C 17/3626 (2013.01); C03C 17/3639 (2013.01); C03C 17/3642 (2013.01); C03C 17/3644 (2013.01); C03C 17/366 (2013.01); C03C 17/3681 (2013.01); C03C 2217/944 (2013.01)
Citation (search report)
See references of WO 2021219961A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
FR 3109776 A1 20211105; FR 3109776 B1 20230324; EP 4143143 A1 20230308; WO 2021219961 A1 20211104
DOCDB simple family (application)
FR 2004310 A 20200430; EP 21732400 A 20210428; FR 2021050738 W 20210428