EP 4147263 A1 20230315 - SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE
Title (en)
SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE
Title (de)
OBERFLÄCHENANALYSESYSTEM MIT EINER GEPULSTEN ELEKTRONENQUELLE
Title (fr)
SYSTEME D'ANALYSE DE SURFACE COMPRENANT UNE SOURCE PULSEE D'ELECTRONS
Publication
Application
Priority
- FR 2004444 A 20200505
- EP 2021061068 W 20210428
Abstract (en)
[origin: WO2021224079A1] The invention relates to a system for analysing the surface of a material, comprising: - a pulsed electron source (10) forming a monochromatic beam of incident electrons (100); - means (20) for conveying incident electrons (100) to the surface of a material sample (55) in such a way as as to form backscattered electrons (110), and backscattered electrons (110) to detection means, the conveying means comprising at least one electron optic; - means (30) for detecting backscattered electrons (110); the pulsed electron source comprising: - a source of atoms (16); - a continuous laser beam (15) configured to form a laser excitation zone (15a) capable of exciting the atoms (16) into Rydberg states; - a pulsed electric field (F) on either side of the laser excitation zone, designed to ionise at least the excited atoms and to form a monochromatic electron beam (100).
IPC 8 full level
H01J 37/073 (2006.01); H01J 37/29 (2006.01)
CPC (source: EP US)
H01J 37/06 (2013.01 - US); H01J 37/073 (2013.01 - EP); H01J 37/22 (2013.01 - US); H01J 37/244 (2013.01 - US); H01J 37/26 (2013.01 - US); H01J 37/29 (2013.01 - EP); H01J 2237/05 (2013.01 - US); H01J 2237/06333 (2013.01 - EP); H01J 2237/06341 (2013.01 - EP); H01J 2237/083 (2013.01 - US); H01J 2237/24475 (2013.01 - US); H01J 2237/2626 (2013.01 - EP)
Citation (search report)
See references of WO 2021224079A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
FR 3110026 A1 20211112; FR 3110026 B1 20220610; EP 4147263 A1 20230315; JP 2023523705 A 20230607; US 2023170176 A1 20230601; WO 2021224079 A1 20211111
DOCDB simple family (application)
FR 2004444 A 20200505; EP 2021061068 W 20210428; EP 21720785 A 20210428; JP 2022563144 A 20210428; US 202117921587 A 20210428