EP 4155243 A4 20240626 - CONVEYANCE DEVICE
Title (en)
CONVEYANCE DEVICE
Title (de)
FÖRDERVORRICHTUNG
Title (fr)
DISPOSITIF DE TRANSPORT
Publication
Application
Priority
- JP 2020089035 A 20200521
- JP 2021018765 W 20210518
Abstract (en)
[origin: EP4155243A1] A conveyance device according to an embodiment of the present invention comprises a plate-shaped main body that faces a plate-shaped object to be conveyed, a plurality of recesses formed in the plate-shaped main body to face an outer circumferential portion of the plate-shaped object to be conveyed, a plurality of discharge channels formed inside the main body, and a plurality of movement restriction members formed on the main body to contact with and to restrict lateral movement of the plate-shaped object to be conveyed. One each of the plurality of discharge channels is connected to one each of the plurality of recesses, and a swirling flow is formed in the plurality of recesses by fluid supplied from the plurality of connected discharge channels. In each of the plurality of recesses, a portion of an opening not covered by the plate-shaped object to be conveyed is covered by one of the plurality of movement restriction members.
IPC 8 full level
H01L 21/683 (2006.01); H01L 21/687 (2006.01)
CPC (source: EP KR US)
B25J 11/0095 (2013.01 - KR US); B25J 15/0019 (2013.01 - US); B25J 15/0616 (2013.01 - KR US); H01L 21/6838 (2013.01 - EP KR US); H01L 21/68707 (2013.01 - EP KR US)
Citation (search report)
- [A] US 2014227045 A1 20140814 - IWASAKA HITOSHI [JP], et al
- [A] US 6322116 B1 20011127 - STEVENS RONALD R [US]
- [A] US 2010270452 A1 20101028 - HOSHINO SABURO [JP], et al
- [A] US 2016300748 A1 20161013 - IWASAKA HITOSHI [JP], et al
- [A] JP 2000007149 A 20000111 - MECS CORP
- See also references of WO 2021235428A1
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
EP 4155243 A1 20230329; EP 4155243 A4 20240626; CN 115552584 A 20221230; JP 2021184421 A 20211202; JP 6888852 B1 20210616; KR 20230009496 A 20230117; TW 202205505 A 20220201; TW I781567 B 20221021; US 2023191620 A1 20230622; WO 2021235428 A1 20211125
DOCDB simple family (application)
EP 21808078 A 20210518; CN 202180035009 A 20210518; JP 2020089035 A 20200521; JP 2021018765 W 20210518; KR 20227043468 A 20210518; TW 110111773 A 20210331; US 202117926957 A 20210518