EP 4165394 B1 20231101 - MEASURING DEVICE AND METHOD FOR MEASURING A REFLECTIVITY OF COATED OPTICAL ELEMENTS
Title (en)
MEASURING DEVICE AND METHOD FOR MEASURING A REFLECTIVITY OF COATED OPTICAL ELEMENTS
Title (de)
MESSVORRICHTUNG UND VERFAHREN ZUM MESSEN EINER REFLEKTIVITÄT VON BESCHICHTETEN OPTISCHEN ELEMENTEN
Title (fr)
DISPOSITIF DE MESURE ET PROCÉDÉ POUR LA MESURE D'UNE RÉFLECTIVITÉ D'ÉLÉMENTS OPTIQUES REVÊTUS
Publication
Application
Priority
- DE 102020115544 A 20200611
- EP 2021065406 W 20210609
Abstract (en)
[origin: WO2021250068A1] The invention relates to a measuring device (100) for measuring a reflectivity of a coated optical element (105) for an objective lens. The measuring device (100) has a light providing unit (107), at least one measuring device objective lens (110) and at least one image sensor (115). The light providing unit (107) has at least one light source (117) which is designed to provide at least two light beams (120), each of which has a different defined wavelength. The measuring device objective lens (110) is formed to focus the light beams (120) onto the coated optical element (105). The image sensor (115) is arranged and designed to sense at least an intensity and/or reflection wavelength of the light beams (125) reflected from the optical element (105) in order to measure the reflectivity in response to the sensed intensity and/or reflection wavelength of the light beams (125) reflected from the optical element (105).
IPC 8 full level
G01N 21/25 (2006.01); G01M 11/02 (2006.01); G01N 21/31 (2006.01); G01N 21/55 (2014.01); G01N 21/84 (2006.01); G01N 21/958 (2006.01)
CPC (source: EP)
G01M 11/0285 (2013.01); G01N 21/25 (2013.01); G01N 21/31 (2013.01); G01N 21/55 (2013.01); G01N 21/8422 (2013.01); G01N 2021/8427 (2013.01); G01N 2021/9583 (2013.01)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
DOCDB simple family (publication)
DE 102020115544 A1 20211216; DE 102020115544 B4 20220331; CN 115769060 A 20230307; CN 115769060 B 20231013; EP 4165394 A1 20230419; EP 4165394 B1 20231101; WO 2021250068 A1 20211216
DOCDB simple family (application)
DE 102020115544 A 20200611; CN 202180041669 A 20210609; EP 2021065406 W 20210609; EP 21731477 A 20210609