EP 4166252 A1 20230419 - MECHANICAL PROPERTY MEASURING DEVICE, MECHANICAL PROPERTY MEASURING METHOD, SUBSTANCE MANUFACTURING FACILITY, SUBSTANCE MANAGEMENT METHOD, AND SUBSTANCE MANUFACTURING METHOD
Title (en)
MECHANICAL PROPERTY MEASURING DEVICE, MECHANICAL PROPERTY MEASURING METHOD, SUBSTANCE MANUFACTURING FACILITY, SUBSTANCE MANAGEMENT METHOD, AND SUBSTANCE MANUFACTURING METHOD
Title (de)
VORRICHTUNG ZUR MESSUNG MECHANISCHER EIGENSCHAFTEN, VERFAHREN ZUR MESSUNG MECHANISCHER EIGENSCHAFTEN, SUBSTANZHERSTELLUNGSANLAGE, SUBSTANZVERWALTUNGSVERFAHREN UND SUBSTANZHERSTELLUNGSVERFAHREN
Title (fr)
DISPOSITIF DE MESURE DE PROPRIÉTÉ MÉCANIQUE, PROCÉDÉ DE MESURE DE PROPRIÉTÉ MÉCANIQUE, INSTALLATION DE FABRICATION DE SUBSTANCE, PROCÉDÉ DE GESTION DE SUBSTANCE ET PROCÉDÉ DE FABRICATION DE SUBSTANCE
Publication
Application
Priority
- JP 2020103334 A 20200615
- JP 2021022593 W 20210614
Abstract (en)
Provided are: a mechanical property measuring apparatus and method that can accurately measure a mechanical property through physical quantities; a substance manufacturing equipment and method that can improve the production yield rate. A mechanical property measuring apparatus (100) comprises: a physical quantity measuring unit (5) configured to measure a plurality of physical quantities of a measured object that includes a substance and a film on a surface of the substance; a classification processing unit (81) configured to select one of a plurality of calculation models (M<sub>1</sub>, M<sub>2</sub>, ..., M<sub>n</sub>) for calculating a mechanical property of the substance, based on at least two of the plurality of physical quantities measured; and a mechanical property calculating unit (82) configured to calculate the mechanical property of the substance using the calculation model selected by the classification processing unit (81) and the at least two of the plurality of physical quantities.
IPC 8 full level
B21C 51/00 (2006.01); G01N 27/80 (2006.01)
CPC (source: EP KR US)
B21C 51/00 (2013.01 - EP KR US); G01N 27/80 (2013.01 - EP KR US); G01N 27/82 (2013.01 - KR); G01N 27/902 (2013.01 - US)
Designated contracting state (EPC)
AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR
Designated extension state (EPC)
BA ME
Designated validation state (EPC)
KH MA MD TN
DOCDB simple family (publication)
EP 4166252 A1 20230419; EP 4166252 A4 20231129; CA 3181997 A1 20211223; CN 115803616 A 20230314; JP 7095814 B2 20220705; JP WO2021256442 A1 20211223; KR 20230011347 A 20230120; US 2023251226 A1 20230810; WO 2021256442 A1 20211223
DOCDB simple family (application)
EP 21826503 A 20210614; CA 3181997 A 20210614; CN 202180042024 A 20210614; JP 2021022593 W 20210614; JP 2021554397 A 20210614; KR 20227043658 A 20210614; US 202118001266 A 20210614